Mounting axes
page 31
7
Mounting axes
Usually the axes are already assembled when the instrument is delivered. This
chapter describes the assembly of axes or tables that were acquired afterwards.
SPAC SPAC SPAC SPAC
7.1
Order of the axes and height compensation with spacers
Up to three axes, manual or software-controlled, can be assembled on the frame.
Setup with one vertical axis and two horizontal axes
Base Spacer
x-Axis
y-Axis
z-Axis (lifting table)
Sample table
Alternative setups
Not mounted x- or y- axes are replaced by an additional spacer respectively.
Instead of an x-axis, a rotating table (wafer table) can be mounted. The wafer
table is mounted onto a z-axis.
Instead of a sample table, an environmental chamber (temperature chamber,
humidity control) may be mounted.
SPAC SPAC SPAC SPAC
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