Section 3: Equipment startup
S540 Power Semiconductor Test System Administrative Guide
3-10
S540-924-01 Rev. D / January 2019
9140A-PCA interlock connections for S540 systems
The following diagram shows the interlock connections to the optional 9140A-PCA Probe Card
Adapter.
Figure 44: 9140A-PCA interlock block diagram for S540 systems
For additional information about the 9140A-PCA, see the
9140A-PCA Probe Card Adapter Instruction
Manual
(part number 9140A-901-01). This manual is available for download at