JEOL JSM-6390 LA, Руководство пользователя

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SEM manual ETHZ v1.4
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A.4) Overview of the JEOL console
The JEOL SEM has a console that is used to control the stage motion (X, Y), and the
electron imaging capabilities (magnification, brightness & contrast, etc.; Fig. 3 ):
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The left side of the console controls the stage motion. Leave the “Stage” setting
to “X/Y”! You can then use the joystick to move along the X and/or Y axis.
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The top-right side of the console “Scanning mode” has several options for the
different scanning rate. You will most likely use only “Scan2” (full-frame fast scan,
ideal for navigating in the sample) or “Scan1” during the alignment (fast scan over a
reduced area). Other scanning options (Scan3 or 4, Photo) are not recommended;
Thermo NSS (
Section H ) is used for acquiring and saving high-quality images.
•
The middle-right side controls either the brightness and contrast (when STIG is
OFF) or the astigmatism correction (when STIG is ON). In any case, prefer the use
of the buttons atop of the electron image to adjust these parameters.
•
The bottom side of the console has 2 similar knobs for magnification (left) and focus
(right). Pay attention to which one you twist!
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Left-one is the MAGNIFICATION knob . It controls the field of view of the
electron image, from 20-40x to 300,000x.
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Right-one is the ELECTRON BEAM FOCUS knob . It controls the focus point
of the electron beam through the objective lens and defines the working
distance (WD) . Activate the “coarse” button for large changes in the focus
(e.g., rough focussing), and DE-activate this “coarse” button for fine tuning.
Figure 3. Overview of the SEM console.