JEOL JSM-6390 LA, Руководство пользователя

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SEM manual ETHZ v1.4
9
C) Sample loading or unloading
The sample change procedure is summarised below. Refer also to Figures 10 and 11a,b .
C.1) Opening the sample chamber
1. In the JEOL SEM program, set the signal to SEI in the bottom section of the program.
2.
If the CL detector was in use, turn it OFF (red button on the CL control box).
3. Turn ON the Deben infrared camera (if not already on).
4. Open the window “Stage” and move the stage to Z = 30 mm (absolute position).
5.
If the CL is inserted (check on the IR camera!), you MUST remove the CL detector
(see Figures 12 and 13 ).
6. On the SEM column, close the valve VT-3 (tight, with the strength of two fingers).
7. Back to the JEOL SEM program, open the window “Sample” and click “Vent”.
WARNING: When the SEM is in LaB
6
mode, check the vacuum gauge while venting
(see on the left side of the SEM) to ensure you don’t lose vacuum. This can sometime
happen due to the valve VT-3 leaking. Only the light “column” should turn orange, all other
lights should stay green. If you lose vacuum, ask immediately for assistance!
This warning does NOT apply if the SEM is in W-mode (see Appendix A2 ).
8. When fully vented, open the sample chamber (see C.2 and Figure 11 ).
C.2) Removing/Loading a sample & closing the chamber
1. Open the sample chamber up to the back stop (use two hands!)
2. Remove the sample and/or load your sample (thin section or 1’’ round mount)
3. If you are loading a new sample, take a snapshot with SNS…
a. Place your sample on the holder.
b. Click the button “SNS” in the top section.
c. Click “Snap”. The stage will drive to the centre of the optical camera.
d. Wait a few seconds until a snapshot of your sample appears in the SEM
program. If you think the SNS image is not properly centred, refer to the
calibration section to calibrate the SNS in
Appendix A1 .
e. IMPORTANT! Lower again the stage to Z = 30 mm after using SNS!
4. Close the sample chamber while looking simultaneously at the IR camera to avoid a
disaster (e.g., sample holder touching a detector).
5. Open the window “Sample” and click “Evac” while pressing on the sample chamber
door. Wait a few seconds until the vacuum catches up.
6. Wait until the signal “Ready” appears.
If this is the end of your session, you are done. Otherwise…
7. Open valve VT-3.
8. Remove the “Beam blank” and proceed with the gun activation (
Section E ) and the
beam alignment ( Section F ).