Inficon ULTRATEST UL3000 Fab, Перевод оригинальной инструкции по эксплуатации

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6 | Operation INFICON
62 / 140 UL3000-Fab-Operating-instructions-iina73en1-08-(1910)
6.3.2 Select gas
DANGER
Danger from a Hydrogen explosion
Hydrogen can explode in combination with oxygen. The allowable composition of
venal gas mixtures can be read in the safety data sheets of the respective
manufacturers.
► Ensure that the share of hydrogen does not exceed the described concentration.
ü
Supervisor - rights
1
> Setup > Measurement > Mass
2
Make a selection from:
"Hydrogen" H
2
(2 amu)
"Helium"
4
He (4 amu)
"Mass 3"
3
He (3 amu)
3
Save .
6.3.3 Setting setpoints
You can set the leak rate for the setpoint to 1, 2, 3 and 4 separately.
When the setpoints are exceeded:
• If the setpoint 1 or 2 is exceeded, the measurement line in the measurement
window changes color.
• The setpoint relay of the digital output switches, see also "I/O module [ } 117]" or
the interface description.
Also setpoint 1 defines the trigger point for the different alarms, see also "Change
audio settings [
}
56]". It is also the limit for I•ZERO, see “Set and use the function
ZERO [ } 67]“.
ü Operator or Supervisor rights
1 > Setpoints
2 Set up.
3 Save .
6.3.4 Activate vacuum ranges
Vacuum ranges You can activate the vacuum ranges MASSIVE, GROSS, FINE and ULTRA for your
measurements.
All 4 areas can be activated at the same time. If several areas are activated, they
switch automatically depending on the inlet pressure. In this way different sensitivities
can be measured with.