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µPG 501
User Guide
31
absolute movement) and click on the arrow beside the fields. Keep in mind to use the
correct signs. The stage moves directly to the distances / coordinates given.
Write head functions
The
XY Stage
register card also contains controls for write head movement. During
standard operation, these functions are never required, as the write head is always
moved automatically in conjunction with the process step that is being done.
NOTICE
These controls have to be used with the utmost care. Crashing the write
head nozzle against the stage or a substrate can damage the system
severely.
With
Lens Up
, the write head can be moved away from the stage into the upper end
switch. This should be done e.g., before unloading with the
Control Panel
, to make
sure that the next substrate does not hit the write head nozzle.
With
Focus
, the write head moves into the position where the focus point of the
objective is on the substrate surface.
•
Never focus on, or close to, the edge of a substrate
•
Never focus beside a substrate
Manual focusing could be helpful if focus values differ a lot across a plate, to make sure
the focus values range around the center of the regulation range. It has to be done if a
plate is loaded using the
Control Panel
rather than the automatic loading sequence
from the Exposure Setup Panel.
If there is no explicit reason to use the
Control Panel
for unloading or loading, rather
use the standard functions!
Another write head related function the
XY Stage
register card offers is a defoc slider.
This only effects the focus of the camera image. During exposure, the defoc is
automatically reset to the value given in the
Expose
panel.
Special movements
The stage
Center
position and the (
Un)load
position can be reached by a single click
on the corresponding button. Make sure the write head is in the upper position before
executing any of these movements.
Also, the
Control Panel
offers the possibility to manually start the
Find Plate Center
routine that detects the plate edges with the autofocus system and calculates the center
position from that.
Содержание mPG 501
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Страница 2: ...PG 501 ii User Guide Doc No DWL HI 049 Revision 5 Feb 2014 Copyright 2014 by Heidelberg Instruments...
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