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µPG 501
User Guide
23
C Target Mode Exposure Preparation
In the
Target Mode
panel, a text box on
the right leads through all steps of
alignment
setup.
The
steps
are
nevertheless also described here.
1. Click on
Start Target Mode
.
Note
:
Anytime
during
alignment,
clicking
Cancel Target Mode
resets the procedure.
2. The
Control Panel
opens below the
Target Mode
panel and shows the
XY
Stage
register card.
3. Use the controls on the
XY Stage
register
to move the position where a box should be exposed into the field of view.
Note
:
To interrupt a movement or procedure, click on the
Stop
button.
•
Choose between 'jog' mode (continuous movement at a certain speed) and
'step' mode (position change by defined increments)
•
Adjust the 'jog' speed with the slider, the 'step' increment in the text boxes
•
Move into a certain direction by clicking on the direction arrows arranged as a
cross
•
If position (in the current coordinate system!) or distance are known exactly,
use the absolute or relative movement. Enter position coordinates / distances
into the fields and click on the arrow beside these to execute the movement.
•
If a certain feature in the camera field should be moved to the center, click on
the cross hair button in the center of the button field, position the crosshair in
the image and then click again on the button.
•
Most of the time, coordinates are refreshed automatically after a movement. In
cases where this did not happen, click on the
Refresh
button at the bottom left
of the button cross to get the current position coordinates.
4. Once the position for exposure is in view, click on
Continue
.
Figure 16: Target Mode panel
Содержание mPG 501
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Страница 2: ...PG 501 ii User Guide Doc No DWL HI 049 Revision 5 Feb 2014 Copyright 2014 by Heidelberg Instruments...
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