HEIDELBERG mPG 501, Руководство пользователя

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µPG 501
28
User Guide
Exposure Optimization
For optimum exposure results, the correct
energy and defocus for a substrate type
has to be determined. To avoid having to
do many single exposures with manually
changed values, the
Series
register card
in the
Control Panel
offers fast setup of
exposure series for one or both
parameters. If both parameters should be
tested, a matrix is exposed to find the
best combination.
The required exposure energy and
defocus depends on type and thickness
of the photosensitive coating, reflectivity
of the substrate, and the developing
process. All these parameters have to be
determined according to the intended
application. For more information on choice of substrate types and processing, please
refer to the corresponding publications on photolithography.
The entries in the fields of the panel are checked. Entry field with wrong entries turn red
and lead to an error. If an entry can lead to results that might or might not be desired,
the related field turns orange, and a warning about the problem is issued (e.g.,
overlapping exposure fields, or an exposure area that is larger than the substrate size
detected during loading).
1. In the
Exposure Setup
panel, select the design that should be used for the
parameter test. If necessary, (re-)convert it according to the instructions given
above and in the
Conversion Software Manual
.
2. Open the
Control Panel
(
Tools Control Panel
). It opens with the
XY Stage
register card in the foreground. Use the functions on this card to move that point of
the substrate into view, around which the test series should be exposed. Set the
coordinates of this position to zero.
Refer to the section on the
Tools
menu for explanations of the
XY Stage
functions.
3. Click on the
Series
tab. A new register card comes to the foreground. Here, on the
right side, the settings for the exposure series are selected. If only a series for
either energy or defoc should be exposed, click on the checkbox for that parameter
series (
Energy Series
/
Defoc Series
). If the option
Both Series
is selected, the
design is exposed in a grid with defoc variation within the rows, and energy
variation along the columns.
4. Set the number of fields, start value(s) and step size(s) for the exposure series. If
only one of the parameters should be varied, enter a constant value for the other
parameter in the corresponding field (
defoc const
/
energy const
).
If invalid values are entered, an error message is issued, and the value is declined.
A step size of 0 e.g., for testing of variation of other influences or of stability is
possible.
Figure 18: Calibration panel