HEIDELBERG MLA150, Руководство пользователя

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MLA150
8 Operator Maintenance and Troubleshooting
72 User Guide
8.2 Troubleshooting
This section suggests corrective action for known issues.
MOUSE DOES NOT MOVE

Switch on the monitor. The mouse is connected to the monitor. If the monitor is
switched off or in sleep mode, the mouse is inactive as well.
THE MLA150 DOES NOT EXPOSE

Verify that the AC power cord is plugged into the wall outlet and that the outlet is
receiving power.

Check whether the laser is switched on and running (see if LED is on).

Verify that the loading window is completely closed.

Try rebooting the system.
LINES NOT TO SIZE
Line thickness problems may have the following causes:

Poor developing chemicals

Wrong developing speed

Wrong resist type or thickness

Focus or energy setting incorrect

Out of date resist
THE MLA150 STOPS ANYTIME DURING THE EXPOSURE

The MLA150 reached an end switch because the imaging area was set incorrectly

The interferometer head is broken

The conversion encountered a problem
SUBSTRATES COME OUT COMPLETELY CLEAR

Laser might be off. Check laser status at LED. If LED is not illuminated, laser is not
running.
BAD ALIGNMENT ACCURACY

Check stability of flow box temperature

Check vacuum quality, make sure no vibrations are transferred via vacuum

Check stage vibrations

Check for drift in position measurement with stage standing still in home position to
find if interferometer laser has to be replaced
SCRATCH MARKS ON WAFER EDGE