HEIDELBERG MLA150, Руководство пользователя

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MLA150
3 System Description
User Guide 23
3.3 Orientation of Stage and Design
It is important to load the substrate with the correct orientation on the center of the
chuck. The coordinate system of the design to be exposed must match the direction and
orientation of structures already exposed on the substrate.
The coordinate system of the stage is oriented such that the y-axis corresponds to a
left-right movement and the x-axis to a backward-forward movement (see Figure 9)
when standing in front of the machine.
The design is exposed rotated by 90 degrees in clockwise direction (Figure 10).
Y
X
loading side
F
90°
clockwise
Figure 10: Machine-related design rotation
F
Figure 9: Orientation of stage and design