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MLA150
6 Job Setup
36
User Guide
6.1 Select Job
To start the wizard, double-click
on the desktop. The
Exposure Wizard
opens
and automatically creates a new job. This job has a
Name
and a
Number
. The name is
editable and can be changed by clicking into the
Name
field. The number is fixed and
auto-incrementing.
If you do not intend to start a new job, you can also choose from the following options:
Continue or repeat a job:
Click
Load Job
.
Repeat an exposed layer of that job:
Click
Restart Job
and select the job you would like to repeat. The process
data of the selected job is deleted and a new job is set up with the same
settings but with a new job name/number.
Start another new job after you have finished an exposure job:
Click
New Job
. The new job has a new number and a new, but editable,
name. Continue with the instructions for a new job.
Use the new job that has started automatically with wizard startup:
From the dropdown list, select one of the available exposure modes:
Standard:
To expose a single design for each layer. Overlay exposures
are possible in this mode.
Series:
To expose designs (e.g. dose test) several times at different
positions with varying parameters (dose or/and defoc). It can
Содержание MLA150
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Страница 2: ...MLA150 ii User Guide Doc No DWL HI 062 Revision 1 July 2016 Copyright 2016 by Heidelberg Instruments...
Страница 10: ...MLA150 1 Introduction 4 User Guide...
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Страница 18: ...MLA150 2 Safety 12 User Guide...
Страница 68: ...MLA150 6 Job Setup 62 User Guide...
Страница 75: ...MLA150 7 System Utilities and Tools User Guide 69 Figure 16 BSA marker zones overview...
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