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MLA150
6 Job Setup
38
User Guide
6.3 Load Design
In Draw Mode there is no design loading procedure because this mode is for
exposing boxes, circles and ellipses of arbitrary size limited only by the camera
field. Skip this subchapter and go to
6.5 Load Substrate.
After you have selected one of the exposure modes (see
6.1 Select Job
) and
determined the appropriate substrate template (see
6.2 Select Substrate Template
), you
load the design. For loading a design that is not in the list, follow the instructions given
in
6.4 Convert Design
. The following sections contain instructions on design loading.
Even though the loading procedures differ only slightly from each other in the different
modes, read the section that corresponds to the exposure mode you are about to use.
6.3.1 STANDARD: FIRST EXPOSURE
In the
Layer
frame:
If available, select a laser from the dropdown list in the
Laser
field.
Double-click into the value field titled
Design
. A panel opens containing a list of
available design files.
From the list, select the required design with a left-click.
Click
Load
. Alternatively, double-click on the design name.
i
i
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Содержание MLA150
Страница 1: ...User Guide MLA150 Maskless Aligner...
Страница 2: ...MLA150 ii User Guide Doc No DWL HI 062 Revision 1 July 2016 Copyright 2016 by Heidelberg Instruments...
Страница 10: ...MLA150 1 Introduction 4 User Guide...
Страница 16: ...MLA150 2 Safety 10 User Guide 2 7 Labels Flowbox front E Rack REAR DOOR FRONT DOOR...
Страница 17: ...MLA150 2 Safety User Guide 11 Optics cover front cover side covers rear cover...
Страница 18: ...MLA150 2 Safety 12 User Guide...
Страница 68: ...MLA150 6 Job Setup 62 User Guide...
Страница 75: ...MLA150 7 System Utilities and Tools User Guide 69 Figure 16 BSA marker zones overview...
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