HEIDELBERG MLA150, Руководство пользователя

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MLA150
6 Job Setup
56 User Guide

Rotation [mRad]: If the Use checkbox is activated, the system calculates the
rotation of the substrate.

Scaling X/Y: The system compares the distance measured during alignment
with the distance given by the alignment positions. From the deviation a
scaling factor results. On this basis the alignment design is shrunk or
stretched in order to match the previous layer.

Shearing [mRad]: The system compensates small distortions such as a
rectangle that appears more like a parallelogram.
Optional: Activate Auto-Unload . The system executes the unloading procedure
automatically (see 6.9 Unload Substrate ).
Click Start Exposure .

The machine is exposing the design. If Auto-
Unload is not activated, then after completion
of the exposure a dialog window pops up
asking if the substrate should be unloaded.
Click
Yes , if you want the system to unload the
substrate or No if the substrate should stay
loaded on the chuck e. g., to expose the next
layer.