HEIDELBERG MLA150, Руководство пользователя

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MLA150
6 Job Setup
User Guide 37
also be used for finding the appropriate dose and defoc
relation for the exposure.
Draw Mode To create boxes, circles or ellipses of arbitrary size limited
only by the camera field. Used for creating connections
between structures or for repairing imperfections in structures
of an exposed layer.
After you have set up the desired job, choose the appropriate substrate and the
corresponding substrate template at the system (see
Substrate Template Selection ).
6.2 Select Substrate Template
The system also needs to be provided with the information about the chosen substrate.
It offers a list of templates. In case the required template is not available in the list, it is
possible to load a new substrate template (only for authorized users).
For selecting a substrate template, follow these instructions:
In the Substrate frame:
Double-click into the value field titled Substrate Template .
From the list, select your substrate size or at least the shape e.g.,
automatic_round if you intent to load a wafer.
Above the list, click Load .

The Substrate frame now displays the selected substrate size or shape and the
field is highlighted in green. That means that the task of substrate template
selection is done. If a substrate size was selected the fields Size X, Size Y,
Diameter and Thickness are filled with the corresponding value.
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