CV-6SLX User Manual
viii
0101-8242-0, Rev. C
Safety Instructions for Operating and Service Personnel
Operators and service personnel should always wear safety glasses. Operators shall not enter areas intended for
service access only. Only experienced service personnel should enter such areas, and only after taking the preliminary
precautions described in paragraphs 1 through 6 below.
DANGER
Potentially lethal voltages may exist within this unit, even with the line power switched off. Service should only
be attempted by qualified personnel. Failure to observe all safety precautions may result in personal injury.
This component is designed to operate as part of a system containing high-voltage equipment. Observe the
precautions described below when servicing this system, especially when servicing components where high voltages
may be present.
1. Before servicing or operating this equipment, read all the component manuals supplied with the system, paying
special attention to safety instructions.
2. Post HIGH VOLTAGE WARNING signs in conspicuous locations within the service area.
3. Remove rings, watches, bracelets, and any other metal jewelry before working around high voltage.
4. DO NOT WORK ALONE!
5. Be sure that all equipment is connected to a power receptacle having the correct polarity and grounding, as
prescribed by the local electrical codes. Refer to the power supply portion of the documentation to determine the
proper electrical ground for high-voltage components.
6. Before servicing any high-voltage component, switch off the electrical power at the component’s main power
switch. This switch should have a lockout feature. Lock the power off and keep the key with you while you are
working on the equipment.
7. Certain electrical parts (e.g., electrolytic capacitors) hold a lethal voltage even after the power is switched off.
Before entering any service area, use a grounding hook to discharge such parts. Be sure that these parts are
discharged before starting any repairs.
8. DO NOT touch high-voltage leads unless power is off and a grounding hook is connected to the parts to be
serviced.
9. The high-voltage components of the system should be equipped with electrical interlocks to protect personnel
from injury. DO NOT ATTEMPT TO DEFEAT, OVERRIDE, OR BYPASS THESE PROTECTIVE DEVICES!
10. Never leave loose ends on high-voltage connections.
11. Observe the following warning if the system employs Radio Frequency (RF) power.
DANGER
RF radiation—even at modest power levels—can cause serious injury. If any of the RF components (e.g.,
the RF power supply, the RF matching network, or the RF electrodes or shielding inside the product
chamber) are moved or changed in any way, the RF energy may be radiated outside the equipment.
Monitor the equipment to assure that external RF radiation is below the levels prescribed by any and all
applicable safety codes.
Содержание Temescal CV-6SLX
Страница 4: ...CV 6SLX User Manual ii 0101 8242 0 Rev C...
Страница 16: ...1 5 TemEBeam Controller EBC Section 1 Introduction to the CV 6SLX CV 6SLX User Manual 0101 8242 0 Rev C 1 4...
Страница 34: ...2 6 Cable Installation Section 2 Installation CV 6SLX User Manual 0101 8242 0 Rev C 2 18...
Страница 90: ...5 5 FPS Fuse Replacement Procedure Section 5 Troubleshooting CV 6SLX User Manual 5 32 0101 8242 0 Rev C...
Страница 92: ...Appendix A Pinout Table for Rear Panel Diagnostic Port J3 CV 6SLX User Manual A 2 0101 8242 0 Rev C...