ferrotec Temescal CV-6SLX, Руководство пользователя

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Section 2: Installation 2.6 Cable Installation
0101-8242-0, Rev. C 2-7 CV-6SLX User Manual
Figure 2-5 Grounding Studs on FPS Front Panel
3 Secure a length of #10 AWG wire to the other grounding lug on the
FPS front panel.
4 Secure the free ends of the 1/2” copper strip and the #10 AWG
ground wire to the vacuum cubicle’s central grounding point.
2.5.5 Electron Beam Source Ground
To ensure a good ground between the electron beam source and the vacuum cubicle, the
following conditions must be met:
•
The base of the source and the surface on which it is mounted (usually the upper surface
of the source tray) must be clean and free of evaporated material.
•
The mounting surface must be made of nonmagnetic material.
•
The source must be securely bolted to the mounting surface.
2.5.6 Mounting the Grounding Hook
If your are installing the CV-SLX unit in a system that does not already have a properly
mounted grounding hook, install the grounding hook provided with the power supply in the
vacuum cubicle, attaching its pigtail to the vacuum cubicle’s central grounding point and the
grounding hook’s storage bracket at a convenient location nearby.
2.6 Cable Installation
For an illustration of cabling details, refer to the CV-6SLX Quick Start Guide (0101-8241-1).
For detailed instructions on connecting the cables shown in this diagram, see sections 2.6.1
through 2.6.5.
Chassis Ground. Connect to vacuum
cubicle’s central gounding point, using
#10 AWG wire.
RF Ground. Connect to vacuum
cubicle’s central gounding point,
using 1/2”-wide copper strap (PN
5621-0032-0).