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Section 5: Troubleshooting

5.4 Troubleshooting Procedures

0101-8242-0, Rev. C

5-21

CV-6SLX User Manual

4. If the symptom is not in evidence during Step 3, troubleshoot the HV path and emitter assembly, following the instructions

in the e-gun manual. If the symptom persists during Step 3, reconnect the HV output cable to J101, switch the power
supply back on, and proceed with the troubleshooting steps described below.

5.

Fault conditions whose investigation

requires removal of HVPS top cover.

5.

Contact Temescal Field Service

.

DANGER: HIGH VOLTAGE

Before performing any of the procedures described on this page, perform the

procedure described in section 5.4.1.

Table 5-10 Filament Current Out Of Regulation

Symptom: When gun and HV are switched on, filament current ramps up and goes out of regulation

Possible Causes

Procedure

1. Faulty or loose connections.

1. Make sure that all HV and FPS connections are correctly and securely made.

2. Short in HV path

2. Check emitter, feethroughs, and cables for signs of shorts.

3. Emitter damaged

3. Follow instructions in gun manual to troubleshoot emitter issues.

4.

Fault conditions whose investigation

requires removal of FPS top cover.

4.

Contact Temescal Field Service

.

Table 5-11 HVPS ARC/OUT OF REGULATION LED Flashes Excessively

Condition indicated: Subthreshold arcing is occurring and/or HV is intermittently out of regulation
NOTE: A problem exists only if arcing is excessive for the material or process in question
Symptoms:

•

HVPS front panel: The

ARC/OUT OF REGULATION

LED flashes excessively. The

HV OUT OF REGULATION

LED turns yellow for 2 seconds each time the

ARC/OUT OF REGULATION

LED flashes

For additional information about this fault mode, see Ishikawa Diagram #6 in Appendix A.

Possible Cause

Procedure

1. Emitter damaged

1. Follow instructions in gun manual to troubleshoot emitter issues.

2. Faulty or loose connections.

2. Make sure that all HV and FPS connections are correctly and securely made.

3. HV feedthrough shorted

3. Check copper bus bars and HV feedthroughs for shorts, coatings, cracks or

arc marks

4. Chamber Pressure too high

4. Chamber pressure should be less than 1 x 10

-5

mTorr.

5. System improperly grounded for HV.

5. Follow grounding instructions provided in e-gun manual.

6. Incorrect or fluctuating line voltage

6. Confirm input line voltage

7.

Fault conditions whose investigation

requires removal of HVPS top cover.

7. Contact Temescal Field Service.

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Содержание Temescal CV-6SLX

Страница 1: ...0101 8242 0 CV 6SLX USER MANUAL Revision C April 2016 Temescal a division of Ferrotec USA Corporation 4569 C Las Positas Road Livermore CA 94551 Tel 1 800 522 1215 Fax 925 449 4096...

Страница 2: ...1 for 400 volt units March 2014 IA B Corrections throughout to cross references Minor changes to technical data in Section 5 Deleted former section 5 6 Suggested Spare Parts lists Pursuant to Field Se...

Страница 3: ...ents 2 3 2 6 Cable Installation 2 7 3 Power Supply Operation 3 1 3 1 Section Overview 3 1 3 2 HVPS Front Panel Controls and Indicators 3 1 3 3 Switches and LEDs on the FPS Front Panel 3 2 3 4 Power Up...

Страница 4: ...CV 6SLX User Manual ii 0101 8242 0 Rev C...

Страница 5: ...Figure 3 6 Operations E Beam Screen with Numeric Keypad Displayed 3 5 Figure 3 7 Operations E Beam Screen Beam on at 5 Power 3 6 Figure 3 8 The EBC s Diagnostics Screen 3 6 Figure 3 9 Remote Controlle...

Страница 6: ...and FPS I O Cable PN 0620 6672 2 2 17 Table 5 1 No Input Power Indicated 5 16 Table 5 2 One or More Interlocks Not Made 5 17 Table 5 3 General Condition HVPS Powered Up But Fails to Achieve HV Ready S...

Страница 7: ...te or local government including specifically but not exclusively any orders rules or regulations issued by an official or agency of any such government affecting the conduct of Seller s business with...

Страница 8: ...ash 10 No implied License The sale of any product or material quoted herein does not give or imply any right or license to buyer to analyze or manufacture such product or material or to claim Buyer is...

Страница 9: ...antor may repair the item at any of its worldwide service locations 5 Exclusions from coverage Warrantor expressly disclaims responsibility for any of the following each of which is expressly EXCLUDED...

Страница 10: ...e local electrical codes Refer to the power supply portion of the documentation to determine the proper electrical ground for high voltage components 6 Before servicing any high voltage component swit...

Страница 11: ...nsibility to set up suitable systems to safeguard the health and safety of employees according to the Health Safety at Work etc Act 1974 User Responsibility This equipment will perform in accordance w...

Страница 12: ...e condensates deposited on the tank walls of a vacuum system are generally in the form of extremely fine particles The nature as well as the form of the materials poses the following potential health...

Страница 13: ...enience for operating as well as service personnel The main components of CV 6SLX units are the HVPS see Figure 1 1 the filament power supply see Figure 1 2 and the control and high voltage cables req...

Страница 14: ...g power to the HVPS and include the AC power required for the FPS whose power cable should always be connected to the HVPS rear panel not to a separate power drop High Voltage Output 6 kW at 10 kV max...

Страница 15: ...iscellaneous Hardware and Interconnection Cables For a complete list of the components and cables included with the CV 6SLX see section 2 2 1 5 TemEBeam Controller EBC In systems without a PLC based s...

Страница 16: ...1 5 TemEBeam Controller EBC Section 1 Introduction to the CV 6SLX CV 6SLX User Manual 0101 8242 0 Rev C 1 4...

Страница 17: ...6 4 Connecting the Control Data Cables Section 2 6 5 Making I O Connections to the Vacuum System CAUTION Before beginning the installation procedure make sure that the facility circuit breaker supply...

Страница 18: ...ugs and wiring The panel should be secured to the rack cabinet by the four mounting holes provided DANGER HIGH VOLTAGE Removal of the HVPS top cover can expose personnel to dangerous or lethal voltage...

Страница 19: ...n in the pattern shown in Figure 2 1 Then place the holes in the bottom of the FPS module over the drilled holes and secure the FPS in place with the hardware provided DANGER HIGH VOLTAGE Removal of a...

Страница 20: ...by connecting the vacuum chamber to the steel structure of the building Where copper straps are attached to frame members the copper must be bolted to clean bare patches of metal The length of copper...

Страница 21: ...le s central grounding point the grounding stud labeled RF GND on the FPS front panel see Figure 2 5 to the vacuum cubicle s main grounding point the source tray to the vacuum cubicle s main grounding...

Страница 22: ...frame The same fastener that secures the above copper strip to the frame should also secure one end of a length of 3 copper strap that connects to the vacuum cubicle s central grounding point as show...

Страница 23: ...be made of nonmagnetic material The source must be securely bolted to the mounting surface 2 5 6 Mounting the Grounding Hook If your are installing the CV SLX unit in a system that does not already h...

Страница 24: ...Connect using AWG 10 stranded UL1015 wire 400 V Model CV 6SLX PN 6024 7120 0 50 60 Hz 3 Phase wye 5 Wire with neutral Connect using AWG 12 stranded UL1015 wire The input power cable is user supplied a...

Страница 25: ...The HV coaxial cable PN 0620 8684 1 conducts the high voltage output of the power module to the FPS module s Plug one end of this HV cable into HVPS rear panel connector J7 see Figure 2 4 Connect the...

Страница 26: ...Panel 2 Insert the threaded end of the conduit elbow into the hole in the conduit panel and secure the elbow with the nut provided as shown in Figure 2 10 Figure 2 10 Conduit Properly Secured to FPS C...

Страница 27: ...igh voltage power supply then before performing this procedure touch the source tray and the terminals on both HV feedthroughs with a properly connected grounding hook Step Action 1 Remove the nut tha...

Страница 28: ...ction 1 Plug the male end of the HVPS FPS cable PN 0620 6672 0 into connector J5 on the power module rear panel see Figure 2 4 2 Plug the female end of the HVPS FPS cable for Gun 1 into connector J102...

Страница 29: ...include both digital and analog signals Digital inputs require a simple contact closure and carry 24 V dc at approximately 20 mA All digital outputs are 24 V dc sourcing a maximum of 50 mA For detaile...

Страница 30: ...PN 0620 6682 0 NOTE Because the interlock string is internally supplied with 24 V dc only contact closure must be supplied by the vacuum system Care must be taken not to allow voltages from other sour...

Страница 31: ...ure between Pins 10 and 11 resets the HVPS RESET 11 DC voltage 24 dc output supplied Pin 10 via a normally open switch controlling HV IS ON INDICATOR 12 Digital output When high 24 V dc this output in...

Страница 32: ...em I Os Exchanged via FPS Front Panel Connector J101 and the FPS I O Cable PN 0620 6672 2 NOTE DEPOSITION CONTROLLER INPUT On the CV 6SLX power supply the polarity of the emission current request inpu...

Страница 33: ...terlock switch installed before the normally closed switch required between J101 Pins 6 and 8 GUN READY INDICATOR 7 Digital output This output goes high 24 V dc when the GUN ENABLE OFF COMMAND IN sign...

Страница 34: ...2 6 Cable Installation Section 2 Installation CV 6SLX User Manual 0101 8242 0 Rev C 2 18...

Страница 35: ...HVPS Front Panel Controls and Indicators Figure 3 1 shows the controls and indicators on the front panel of the CV 6SLX HVPS Those features are described in detail below Figure 3 1 CV 6SLX HVPS Front...

Страница 36: ...green when the HV is switched on Fault Indicator LEDs For detailed information about fault indicator LEDs see sections 5 2 2 and 5 2 3 3 3 Switches and LEDs on the FPS Front Panel Figure 3 2 shows the...

Страница 37: ...he CV 6SLX If not proceed to Step 2 1 Set the facility breaker switch to the ON position 2 Set the circuit breaker switch labeled AC MAINS on the power module front panel to the ON position 3 Set the...

Страница 38: ...gun are off when the HV alone is on and when the gun alone is on Touching the E BEAM button when the beam is on switches the HV and the gun off Figure 3 4 shows the Operations E Beam screen when the...

Страница 39: ...EBC will then display a keypad screen which you can use to enter a percent power setpoint After you do so and touch Enter to close the keypad the power supply will ramp up to that power setpoint In F...

Страница 40: ...ed kV Set to open a numeric keypad 2 Use the keypad to enter the desired kV value 3 Touch the keypad s Enter button to close it If the HV is on when you perform this procedure the HVPS will begin oper...

Страница 41: ...ing power supply fault has occurred For additional information about latching HVPS faults see section 5 2 Gun Section Is Ready LED Status of the IS READY input from the FPS Is ON LED Status of the IS...

Страница 42: ...tem Controller 3 6 1 Switching Main Power On Off To switch on three phase input power to the power supply set the HVPS front panel s main power breaker to the ON position i e all the way up To switch...

Страница 43: ...PS rear panel connector J4 see Table 2 1 Switching On the High Voltage Following a Latching Fault Condition Switching off the HV by pressing the HV OFF button on the power module front panel triggers...

Страница 44: ...lt occurs If the REM LOC IN signal supplied via J4 Pin 5 is low the operator can switch off the HV by pressing the HV OFF button on the HVPS front panel see see Figure 3 1 If the REM LOC IN signal is...

Страница 45: ...and 11 on HVPS rear panel connector J4 an HV ON input supplied via HVPS J4 Pins 8 and 9 The remote HV ON signal can be supplied either from an EBC see section 3 5 or from a PLC based system controller...

Страница 46: ...urn green and the ART OUT OF REGULATION LED will no longer flash In addition the HV ON LED is extinguished as the fault condition causes the HV to be switched off This latched fault state is illustrat...

Страница 47: ...t AC line transients at common levels The load side of LF1 feeds three phase circuit breaker CB1 see Figure 4 2 as well as the J2 the filtered rear panel IEC auxiliary outlet see Figure 4 1 Circuit br...

Страница 48: ...e 4 2 CV 6SLX HVPS Internal Components Referenced in Section 4 2 Step Down Transformer T2 HV Output Transformer HV Regulator Board PS1 24 V dc Power Supply HV Inverter Board HV Output Board Line Filte...

Страница 49: ...o the temperature of the heat sink near the Inverter board s IGBTs Both sensors feed the over temperature fault circuitry Cooling of internal components is provided by 24 VDC fan B1 mounted on the rea...

Страница 50: ...eled J5 on rear panel provides the interface to the filament power supply J2 a 37 pin D sub connector labeled J3 on rear panel provides diagnostic signals to the user s system Appendix B provides a pi...

Страница 51: ...the filament As Figure 4 5 shows the Filament Output section on standard FPS units consists of an HV vacuum relay and a filament transformer On FPS units with PN 0620 6604 2 the Filament Output secti...

Страница 52: ...eration Section 4 Theory of Operation CV 6SLX User Manual 0101 8242 0 Rev C 4 6 Figure 4 4 Component Location in Standard FPS Units PN 0620 6604 0 Figure 4 5 Top Level Block Diagram for Standard FPS U...

Страница 53: ...of Operation 4 3 FPS Theory of Operation 0101 8242 0 Rev C 4 7 CV 6SLX User Manual Figure 4 6 Component Location in FPS Units with PN 0620 6604 2 Figure 4 7 Top Level Block Diagram for FPS Units with...

Страница 54: ...ed by inductors L 10 and L 11 in combination with rail capacitors C 11 and C 12 Low Voltage DC Supplies Low DC voltages of 24 V 12 V 5 V and 12V are supplied by T 102 via bridge rectifiers DB 14 and D...

Страница 55: ...ch Q 11 The PWM is controlled by the filament current control circuits The filament current feedback circuit utilizes transformer CT 10 to measure the filament transformer primary current The signal i...

Страница 56: ...buffer U205A to the summing junction of the emission current loop compensation circuit of U106A via R54 The emission current feedback signal Emission Monitor EM comes from the HV current transducer in...

Страница 57: ...ck oscillator U203 allowing it to clock the counter The counter outputs drive the 8 bit D A converter U202 The D A output is Ref times the count divided by 256 volts This count up process continues un...

Страница 58: ...routed to the vacuum relay K101 On such units K101 either connects the negative HV to the secondary of the filament transformer or applies a ground to the secondary of the filament transformer The rel...

Страница 59: ...resolve a given problem by such simple measures as ensuring that cable connections are properly made or ensuring that the turret on multipocket sources can turn freely In other cases the information p...

Страница 60: ...off this LED is yellow Turns green when HV is on Turns green when the HVPS is powered up Normally green turns red when a latching power supply fault has occurred 5 2 2 LEDs That Indicate Nonlatching F...

Страница 61: ...ead the LEDs described in these illustrations are shown as red merely to highlight them Figure 5 4 Filament Load Fault and Filament Power LEDs LED is normally green when FPS is powered up Turns red to...

Страница 62: ...s with Latching Fault LEDs Outlined Figure 5 6 Interlocks OK and Rail Undervoltage LEDs Turns red one or more interlocks internal or external are not met LED turns red if the rail voltage falls below...

Страница 63: ...m nominal requested HV setpoint value by more than 5 LED turns red if the arc rate exceeds threshold value of 400 arcs sec or if threshold arcing above 300 Hz persists for more than 120 sec Figure 5 9...

Страница 64: ...Beam After HV and Gun Are Switched ON 5 8 Ishikawa Diagram 4 HV Output Unstable 5 8 Ishikawa Diagram 5 HV Out of Regulation LED Lights Frequently 5 9 Ishikawa Diagram 6 Arc Out of Regulation LED Ligh...

Страница 65: ...tactor defective not pulling in Mains Phase missing Incorrect mains supply voltage Interface I O cables missing or not correctly plugged in seated Interlock signal to HVPS J4 not correct Pin 24 Interl...

Страница 66: ...ter incorrectly assembled HV relay defective Consequence Possible Causes HV and gun switched ON but no beam is emitted see Table 6 8 Loose or faulty connections Loose or faulty connections in emitter...

Страница 67: ...onsequence Possible Causes Shorts loose connections on HV feedthrough s or HV connection path HV Out of Regulation LED lights frequently see Table 6 11 Other Mains Damaged emitter Short in HV path FPS...

Страница 68: ...PCB Mains AC phase missing AC mains input not correct or low phase to phase phase to ground readings Rail to A3 HV Reg PCB incorrect A3 TP29 to ref 10V 1000 VDC for actual rail Blown F3 fuse on A1 HV...

Страница 69: ...connection cable from A2 HV Output PCB to A3 HV Regulator PCB Other Emitter damaged Consequence Possible Causes Loose cables HV Overvoltage LED lights red see Table 6 14 Defective HV Output PCB Incorr...

Страница 70: ...ath or output path HV feedthrough shorted damaged Faulty loose connections in FPS connections or chamber feedthrough Temp Sensors Connection J6 on inverter not made or brokern Power Supply Ambient tem...

Страница 71: ...F2 on A1 HV Inverter PCB blown Consequence Possible Causes Aux Power Supply Low LED lights red see Table 6 20 A3 HV Regulator PCB defective HV Inverter PCB defective Consequence Possible Causes Power...

Страница 72: ...see Table 6 22 HV feedthrough damaged or coated Dirty damaged emitter assembly Broken damaged filament Incorrect filament status signal from FPS 24 VDC from J102 Pin 6 Filament Load Fault and Filamen...

Страница 73: ...3 Check the emitter assembly the HV leads the HV feedthroughs and the source tray for flakes and debris and clean as necessary 4 Check the emitter s filament for breaks and replace if necessary 5 Che...

Страница 74: ...HVPS EXTERNAL CONTROL FAULT LED lights red 5 28 Table 5 22 HVPS FILAMENT LOAD FAULT LED lights red 5 28 Table 5 23 HV Is Switched On but FPS Front Panel HIGH VOLTAGE ON LED Fails To Light 5 29 Table 5...

Страница 75: ...PN 0620 6672 0 is securely connected to HVPS rear panel connector J5 and to FPS connector J102 3 Fault condition s whose investigation requires removal of HVPS top cover 3 Contact Temescal Field Serv...

Страница 76: ...meout Alarm HVPS Front Panel HV ON LED fails to light Green EBC issues HVPS Go On Failure alarm Possible Causes Procedure 1 HV READY signal is not present 1 See Table 5 3 2 After remote HV GO ON comma...

Страница 77: ...re than 9 seconds observing whether the symptom persists during that interval CAUTION DO NOT leave the high voltage on for more than 9 seconds with the HV cable disconnected Doing so will result in th...

Страница 78: ...Before performing the following procedure perform the procedure described in section 5 4 1 Table 5 9 HV Output Unstable Symptom HV fluctuates or sags from requested level For additional information a...

Страница 79: ...conditions whose investigation requires removal of FPS top cover 4 Contact Temescal Field Service Table 5 11 HVPS ARC OUT OF REGULATION LED Flashes Excessively Condition indicated Subthreshold arcing...

Страница 80: ...per manual 3 Incorrect line phase 3 Confirm line phase as per specifications 4 Faulty or loose cable connections 4 Make sure that all power module and FPS cable connections are correctly and securely...

Страница 81: ...unded for HV 4 Make sure that grounding instructions in e gun manual have been correctly implemented If preceding steps have failed to correct the fault perform the following procedure 1 Switch off th...

Страница 82: ...operly grounded for HV 4 Make sure that grounding instructions in e gun manual have been correctly implemented If preceding steps have failed to correct the fault perform the following procedure 1 Swi...

Страница 83: ...red Condition indicated Latched PS fault due to either an arc duration 120 ms or arc rate 200 Hz Symptoms TCS issues PSU1_FAIL_ALM Power Supply Control Is On failure alarm HVPS Front Panel OUTPUT ARC...

Страница 84: ...steps have failed to correct the fault perform the following procedure 1 Switch off the power supply 2 Disconnect HV output cable from HVPS J1 3 Switch on the power supply and the HV and leave them sw...

Страница 85: ...ocedure 1 Incorrect or fluctuating line voltage 1 Check input line voltage 2 Fault condition s whose investigation requires removal of HVPS top cover 2 Contact Temescal Field Service DANGER HIGH VOLTA...

Страница 86: ...PS J4 is below its minimum value 20 V dc Symptoms TCS displays PSU1_FAIL_ALM Power Supply Control Is On failure alarm HVPS Front Panel EXTERNAL CONTROL FAULT and POWER SUPPLY FAULT LEDs are lit EBC Fa...

Страница 87: ...l information about this fault mode see Ishikawa Diagram 16 Possible Cause Procedure 1 HVPS rear panel connector J1 not supplying 208 V ac power 1 Disconnect FPS power cable from HVPS J1 and check J1...

Страница 88: ...hown in Figure 5 11 Figure 5 11 Prying Open the Fuse Block Cover on FPS Front Panel 10 Using the same screwdriver pry the fuse block out of its holder as shown in Figure 5 12 Figure 5 13 shows the fus...

Страница 89: ...242 0 Rev C 5 31 CV 6SLX User Manual 12 Push the fuse block all the way into its holder and snap its cover back into place 13 Reconnect the FPS input power cable 14 Switch on facility breaker supplyin...

Страница 90: ...5 5 FPS Fuse Replacement Procedure Section 5 Troubleshooting CV 6SLX User Manual 5 32 0101 8242 0 Rev C...

Страница 91: ...igital Controls 0 24 V dc 24 V dc Control Power 10 0 10 V dc 0 24 V dc Fault at below 19 5 V dc Overtemp Trip 11 0 24 V dc 0 V dc Fault Inverter temperature overload above 67 C or cooling fan failure...

Страница 92: ...Appendix A Pinout Table for Rear Panel Diagnostic Port J3 CV 6SLX User Manual A 2 0101 8242 0 Rev C...

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