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Figure 14 nEXT85 pumping speed versus inlet pressure performance graph

Figure 15 nEXT85 compression ratio versus backing pressure graph

Table 11

Maximum transient backing pressure at zero inlet flow

Parameter

nEXT85D

nEXT85H

19 mbar

21 mbar

19 mbar

21 mbar

30 mbar

22 mbar

21 mbar

Maximum transient backing pressure is the pressure which can be sustained for a short

time at 120 W.

07/2021 - ©Edwards Limited

Page 33

B8G000880_E

B8G000880_E - Technical data

Содержание nEXT 55

Страница 1: ...nEXT Turbomolecular Pumps nEXT 55 85 INSTRUCTION MANUAL B8G000880_E Original instructions edwardsvacuum com...

Страница 2: ...make any expressed or implied warranties regarding the content As far as practical we have ensured that the products have been designed and constructed to be safe and without risks when properly inst...

Страница 3: ...ol and monitoring 16 2 5 4 Serial control with parallel monitoring 16 2 5 5 Parallel control with serial monitoring or serial configuration 17 2 5 6 Motor controller configuration serial configuration...

Страница 4: ...ble 51 4 6 3 Serial protocol 52 4 6 4 Command set 52 4 6 5 Multi drop operation 56 4 7 Connection for mixed parallel and serial operation 58 4 8 Cooling 59 4 8 1 Cooling requirements 59 4 8 2 Forced a...

Страница 5: ...ture readings 78 6 4 6 Monitor link parameter readings 79 6 4 7 Monitor measured motor speed 79 6 5 Mixed parallel and serial operation 79 6 6 Operation with a TIC or TAG 81 6 7 Decelerating and venti...

Страница 6: ...t strainer 103 12 3 Inlet flange seals and integrated inlet screens 103 12 4 NW16 and NW25 ports 104 13 Accessories 105 13 1 Air cooler 105 13 2 Water cooler 105 13 3 Flange heater 106 13 4 TAV5 vent...

Страница 7: ...mance graph 33 Figure 15 nEXT85 compression ratio versus backing pressure graph 33 Figure 16 nEXT55 pumping speed versus inlet pressure performance graph 37 Figure 17 nEXT55 compression ratio versus b...

Страница 8: ...about safety operation or maintenance of the device please contact our nearest subsidiary Important safety information is highlighted as warning and caution instructions Obey these instructions WARNIN...

Страница 9: ...s Identifies a potential hazard from a hot surface Warning Protective earth ground Earth point for electrical equipment Warning Use protective equipment Use appropriate protective equipment for the ta...

Страница 10: ...Electrical data on page 24 The controller drives the brush less motor in the pump Two variants of the pump are The D or Duplex variant which has turbomolecular blades and a drag mechanism that allows...

Страница 11: ...C and a pressure of 1013 mbar 1 013 x 105 Pa 2 2 Pump model description Figure 1 Pump model description 2 3 Motor controller The motor controller has the drive electronics that control the pump opera...

Страница 12: ...the electrical supply fails the controller uses the motor in the pump as a generator This means the pump has its own regenerative supply and a separate battery for emergency power backup is not neces...

Страница 13: ...ing and options on page 66 If slow ramp up of the pump is necessary for the application extend the timeout period The timer is permanently enabled for ramp up If the rotational speed of the pump decre...

Страница 14: ...down time by controlling the vent rate through a single large orifice across the speed range of the pump A list of the venting options is given in Vent options vent valve connection and control on pag...

Страница 15: ...V output for a number of pump parameters The logic interface supports the serial control and the parallel control to monitor and control through one connector For serial control RS232 default or RS485...

Страница 16: ...three signal lines The serial data lines have the same connector pins as the parallel signals standby and fail The serial data lines can be configured to give an RS485 compliant or RS232 compatible i...

Страница 17: ...the serial link has to be disconnected We recommend you to make a special cable for the serial communications that includes a link between the serial enable and 0 V This way the serial enable is autom...

Страница 18: ...XT55D CF63 NW16 80W Maximum inlet flange temperature 120 C Maximum permitted external magnetic field 5 mT Radial for standard aluminium enve lope pump Pollution degree 61010 1 Pollution degree 2 Equip...

Страница 19: ...ents shown are in mm inches Figure 4 Dimensions nEXT85 ISO100 All measurements shown are in mm inches Figure 5 Dimensions nEXT85 DN40 All measurements shown are in mm inches 07 2021 Edwards Limited Pa...

Страница 20: ...le 8 Backing port NW16 Optional NW25 1 Body purge port 1 8 BSP 2 Envelope vent port 1 8 BSP 3 Alternative backing port position 4 4 x holes M5 x 12 deep Base mounting holes and fan mountings 5 79 PCD...

Страница 21: ...4 V supply cable 3 Backing port NW16 Optional NW25 4 Body purge port 1 8 BSP 5 79 PCD mounting port 6 4 x holes M5 x 0 8 6H Base mounting holes and fan mountings 3 2 Operating and storage conditions T...

Страница 22: ...Vent gas Dry air nitrogen argon or other inert gases Maximum dew point at an atmospheric pressure 22 C Maximum size of particulates 1 m Maximum concentration of oil 0 1 parts per million Recommended t...

Страница 23: ...ge gas 1 bar gauge 14 5 psig 2 x 105 Pa 3 5 Cooling water Table 5 Water cooling block supply requirements Parameter Reference data Quality Mechanically and optically clear with no deposits or turbidit...

Страница 24: ...s If the rapid cycling of the pump is necessary for an application you can get faster rate of increase in the pump speed if the power supply supplies higher current up to a maximum in accordance with...

Страница 25: ...f damage to equipment Do not use the pump to pump particulates or condensable media Deposition can occur in the pump which will degrade the pump performance and decrease the pump life CAUTION OXYGEN C...

Страница 26: ...The pump has a 15 way logic interface connector at the end of the logic interface cable Use an applicable connector mating half not supplied to connect the nEXT pump to the customer equipment Refer t...

Страница 27: ...fied precision Normal status output Type Open collector transistor plus pull up resis tor Refer to Figure Interface circuits for nEXT turbo pump controllers Normal speed default 80 Off 2 2 kW pull up...

Страница 28: ...ial enable Connect to Pin 2 to enable the serial link 7 FAIL Serial TX RS485 B Logic high when fail condition exists and serial enable is inactive and RS485 RS232 switch is in the RS232 position 9 Ana...

Страница 29: ...on page 105 The connector supplies the power to the vent valve or a fan The connector is shown in Figure Valve connector with the polarity of the pins marked when the vent valve or fan is set to on Th...

Страница 30: ...enables the combination of fan or vent valve accessory to be connected configured and controlled correctly The nEXT air coolers and vent valve accessories which have the corresponding connector insta...

Страница 31: ...ow or stopped If the next service is available the LED flashes in a se quence to show which service operation is necessary Refer to Fault finding on page 90 The LED is duplicated at the sides of the p...

Страница 32: ...7 47 He l s 1 78 78 78 78 80 78 61 61 H2 l s 1 60 54 60 54 60 54 49 49 Ar l s 1 80 80 80 80 84 84 44 44 Peak compression ratio from the backing port to the main inlet port N2 1011 He 8 x 106 2 x 107 8...

Страница 33: ...Table 11 Maximum transient backing pressure at zero inlet flow Parameter nEXT85D nEXT85H N2 19 mbar 21 mbar He 19 mbar 21 mbar H2 30 mbar 30 mbar Ar 22 mbar 21 mbar Maximum transient backing pressure...

Страница 34: ...T85D Nitrogen Gas Type N2 Cooling method Ambient Temperature 20 C 30 C 40 C Through put sccm Inlet Pres sure mbar Through put sccm Inlet Pres sure mbar Throughput sccm Inlet Pressure mbar Natural conv...

Страница 35: ...decreases below nominal Values are given without inlet screen Table 15 Maximum continuous inlet pressure throughput nEXT85D Argon Gas Type Ar Cooling method Ambient Temperature 20 C 30 C 40 C Through...

Страница 36: ...Table 17 Pump performance data Parameter nEXT55D nEXT55D Mass 2 5 Kg 3 5 Kg Main inlet port ISO63 CF63 Exhaust port NW16 Vent port 1 8 inch BSP Main inlet pumping speed N2 l s 1 55 He l s 1 41 H2 l s...

Страница 37: ...rformance graph Figure 17 nEXT55 compression ratio versus backing pressure graph Table 18 Maximum transient backing pressure at zero inlet flow Parameter nEXT85D N2 19 mbar He 19 mbar 07 2021 Edwards...

Страница 38: ...onditions at sea level in negligible magnetic field with 120 W power limit setting Refer to Cooling on page 59 for cooling conditions At pressures above these the rotational speed decreases below nomi...

Страница 39: ...ed inlets and outlets to prevent the entry of dust and vapour 3 Do not remove the seals until the pump is installed on the vacuum system 4 Open the cardboard box from the top 5 Open the box lid 6 Remo...

Страница 40: ...ctor 16 Regulated purge gas supply 17 WCX water cooler and connections 18 Axial air cooler 19 1 Vacuum system 2 High vacuum gauge 3 Vibration damper 4 Inlet screen 5 nEXT pump 6 Backing valve 7 Vacuum...

Страница 41: ...of damage to equipment Make sure that there are no foreign objects inside the pump when you do the installation Install the supplied integral mesh centring O ring seal or the mesh screen when you ins...

Страница 42: ...happens We accept no responsibility for injury or damage to persons equipment or property as a result of a failed pump ejecting parts into a customer s system To mount the pump base mount use 4 x M5 b...

Страница 43: ...d bolts to connect the inlet flange of the pump to the vacuum system A minimum grade screw of ISO898 1 class 5 6 500 MPa tensile strength is recommended If the pump has an ISO flange use a manufacture...

Страница 44: ...pump do not limit the exhaust line when you vent from a positive pressure gas supply CAUTION BEARING LIFE Risk of damage to equipment Do not use the pump with a backing pressure less than 5 x 10 4 mba...

Страница 45: ...e use a flow controller or a pressure regulator and calibrated flow restrictor The PRX10 purge restrictor accessory is applicable for the purpose Refer to Accessories on page 105 4 3 2 Connect the pur...

Страница 46: ...the pump body and the ground connection point must be 0 1 4 4 2 Connect the logic interface to the TIC or TAG If the manufacturer s TIC Turbo Instrument Controller TIC Turbo Controller or TAG Controll...

Страница 47: ...and can cause a mechanical hazard in failure conditions WARNING HOT SURFACE Risk of injury or damage to equipment When you connect the pump to the power supply make sure that all 3 pins for the 24 48...

Страница 48: ...e switch is in the RS232 default position Refer to Connect the serial interface to the customer control equipment on page 49 1 To monitor an analogue output connect the customer control equipment to t...

Страница 49: ...he slide switch use a small tool to toggle the slide switch The default setting of the motor controller is RS232 serial interface Replace the round seal to make sure the pump stays IP rated CAUTION PU...

Страница 50: ...rop connection using RS232 interface When the RS485 option is selected it is easy to connect number of pumps to a single master Refer to Figure RS485 multi drop connection Figure 21 Motor controller s...

Страница 51: ...vate the serial enable To activate the serial enable link the serial enable input signal pin 5 to pin 2 of the customer logic interface mating half We recommend you to incorporate this link into the s...

Страница 52: ...onse when a new start character is received If the pump receives an unrecognisable message between the start and stop characters it will return an applicable error message Refer to Multi drop operatio...

Страница 53: ...link current 0 15000 decimal 0 1 Watts Measured link power Pump run hours V862 0 65535 decimal hours Hours run by pump Temperature readings 2 V865 200 200 decimal C Measured motor temper ature 200 20...

Страница 54: ...will clear the override Valve 1 type S877 0 0 decimal Normally Open Valve S877 1 Normally Closed Valve power cycle is required Valve 2 type S878 0 0 decimal Normally Open Valve S878 1 Normally Closed...

Страница 55: ...f fail hard vent when 50 speed 3 If stop hard vent If fail controlled vent 50 speed then hard vent 50 speed 4 If fail hard vent If stop hard vent when 50 speed 5 If fail hard vent If stop controlled v...

Страница 56: ...ut is permanently de energised Fan OFF 11 Do not use 12 Do not use 13 Do not use 14 Hard vent when 50 speed if stop 15 Controlled vent if 50 speed then hard vent if 50 speed if stop 4 6 5 Multi drop o...

Страница 57: ...the single pump systems The wild card address 99 is useful which means any node After a pump has been assigned a multi drop address it will ignore the messages in the format for the single pumps An in...

Страница 58: ...The connection is a combination of the parallel and serial connection given in Connect the parallel control and monitoring on page 47 and Connection for serial control and monitoring on page 49 Optio...

Страница 59: ...switch 12 Start switch 1 RS232 interface on control equipment 2 24 V d c electrical supply 3 Fuse 4 Optional LED indicator system OK 5 Optional LED indicator normal speed 6 Current limit resistor for...

Страница 60: ...can configure the customer controller to operate the air cooler only if the commands can be sent through the serial interface or a manufacturer s TIC Turbo and Instrument Controller or Turbo Controlle...

Страница 61: ...approximately 10 mm outer diameter into the ends of the hose connectors of the water cooler at the pump You can also remove the hose connectors from the water cooler to make a connection to the 1 8 i...

Страница 62: ...e button on the motor controller to adjust the standby speed Refer to Standby speed setting on page 65 If the nEXT pump is operated with parallel control and monitoring and the controller settings wil...

Страница 63: ...ength All data fields have a maximum of 5 decimal characters prefixed by a minus number for the negative numbers Fields that have multiple X characters shows maximum length and does not show fixed len...

Страница 64: ...motor controller The motor controller on auxiliary output 2 can supply the power to the fan Send the command that follows Command S 8 6 4 sp 8 cr The reply is as follows Reply S 8 6 4 sp r cr The perm...

Страница 65: ...ng option is set send a query as follows Reply S 8 7 7 cr The reply is as follows Reply S 8 7 7 sp d cr 5 1 6 Standby speed setting You can operate the pump at a standby speed rather than full rotatio...

Страница 66: ...pump To check what normal speed is set send a query as follows Command S 8 5 6 cr The reply is as follows Reply S 8 5 6 sp d d d cr 5 1 8 Timer setting and options The timeout period is a user config...

Страница 67: ...d 1 means enabled Reply S 8 7 0 sp d cr 5 1 9 Analogue signal options The analogue output can be used to monitor one of the five different parameters Table 26 Analogue signal options Option number De...

Страница 68: ...nabled Reply S 8 7 2 sp d cr 5 1 11 Factory settings The pump can be configured again to its original factory settings with one serial command To reset the motor controller to factory settings send th...

Страница 69: ...reply will be as follows where dd shows the multi drop address of the pump Reply 9 9 9 9 S 8 5 0 sp d d cr Multi drop mode can be disabled by assigning the pump an address 0 To do this send the comman...

Страница 70: ...roller or TIC Turbo Controller Instruction Manuals for information on how to do the settings Note You cannot configure the Analogue Output Options using the TIC You cannot assign a multi drop address...

Страница 71: ...ow the backing pump to decrease the system pressure to 10 mbar before you start the nEXT pump Close the vent valve before you start the backing pump When you use the motor controller to control the TA...

Страница 72: ...to open the manual vent valve only after the pump speed decreases to 50 of the full rotational speed A manual vent valve is supplied with the pump Precise controlling of the rate of increase in pressu...

Страница 73: ...pump The vent valve with the auxiliary connector installed is plugged into the 4 pin auxiliary connector socket Refer to Figure Auxiliary interface connection The controller can control number of dif...

Страница 74: ...in Table Vent valve options and Table Valve types The controller can be configured to one of the other venting options provided commands can be sent through the serial interface or a manufacturer s T...

Страница 75: ...t installed open the vent valve only after the speed of the pump decreases to 50 of full rotational speed Vacuum system volume litres Orifice diameter mm 20 1 0 10 0 7 5 0 5 2 0 35 6 3 Operation with...

Страница 76: ...eed it will accelerate or decelerate until standby speed is reached 1 To operate the pump at standby speed link the standby control input to the 0 V control reference on the logic interface connector...

Страница 77: ...the vent valve but when a stop command is sent to the pump the override will be cleared 6 4 2 Start the pump WARNING EXPOSED ROTOR Risk of injury Do not operate the pump with its rotor exposed Connect...

Страница 78: ...t standby speed send the command over the serial communications link that follows Command c 8 6 9 sp 1 cr The reply is as follows Reply c 8 6 9 sp r cr To return the pump to full speed send the comman...

Страница 79: ...measured motor speed The measured rotational speed of the motor in the pump can be monitored Send the query that follows Command v 8 5 2 cr The reply is follows where first returned number shows the...

Страница 80: ...speed will switch between run speed and standby speed in response to data driven onto the RS485 bus by other devices connected to the bus It is not recommended to activate the parallel start line with...

Страница 81: ...TIC or TAG 6 7 Decelerating and venting Decelerate the pump before venting The system can be vented in accordance with the advice given in Vent options vent valve connection and control on page 72 CAU...

Страница 82: ...um power delivered to the pump Refer to Table Pump performance data for maximum permitted inlet pressure 6 8 2 Operation at high temperatures Temperature sensors in the pump mechanism and electronics...

Страница 83: ...his can be used to power other instruments through short power interruptions The minimum voltage of this supply will be 24 V d c 20 19 2 V provided that the external load is not excessive and it can b...

Страница 84: ...al depend on the control mode send a start command to speed up the pump to the designa ted speed Power is restored after the rotational speed of the pump decreases below 50 and the regenerative power...

Страница 85: ...sufficiently long to remove water condensation from the pump However the bakeout time will depend on the amount of condensation in the pump and the vacuum system and the ultimate pressure desired 6 1...

Страница 86: ...ommend you to send the pump to our Service Centre for a bearing or oil cartridge replacement purchase an oil cartridge or bearing service kit and replace the bearing or oil cartridge on site Refer to...

Страница 87: ...is as follows Reply v 8 8 1 sp h h h h h h h h cr The service status word is made up of 8 hexidecimal digits To decode the word convert each digit into a 4 digit binary number same as the system stat...

Страница 88: ...run hours and recommended service time of the rotor in the pump can be monitored Send the query that follows Command v 8 8 4 cr The reply is as follows where first number is the start stop cycles com...

Страница 89: ...cr 7 9 Oil cartridge run time The run hours and recommended service time of the oil cartridge in the pump can be monitored Send the query that follows Command v 8 8 6 cr The reply is as follows where...

Страница 90: ...flash for 0 5 seconds when the system is set to on Cause The electrical supply has failed Remedy Make sure that the electrical supply is set to on and the fuses and current limiting devices are not tr...

Страница 91: ...supplier Fault Ultimate pressure cannot be reached Cause Pressure is limited by water vapour Remedy Bake the system and pump Cause The vacuum gauges are contaminated Remedy Clean or replace the vacuu...

Страница 92: ...Remedy A defective bearing Contact us or the supplier Cause The pump makes a constant high pitched noise Remedy The rotor is out of balance Contact us or the supplier Fault No serial comms Cause No el...

Страница 93: ...oftware is upgrading complete the upgrade process If the red alarm LED is on at other times restart the system upgrade the software if restarting the system does not correct the fault Fault The red al...

Страница 94: ...aintenance on page 86 8 3 Flashing error codes When a fail condition becomes active the red alarm lights continuously or shows a flashing sequence If the error light is on continuously this shows a pr...

Страница 95: ...error flash code sLssLs signifies error 2 controller failed internal configuration and calibration operation and error 5 pump internal measurement system disconnected or damaged 8 4 Decoding system s...

Страница 96: ...ed by us Binary digits 0 0 1 0 0 0 1 0 1 0 0 0 0 0 1 1 0 0 0 0 0 0 0 0 0 0 1 0 0 0 1 0 3 1 3 0 2 9 2 8 2 7 2 6 2 5 2 4 2 3 2 2 2 1 2 0 1 9 1 8 1 7 1 6 1 5 1 4 1 3 1 2 1 1 1 0 9 8 7 6 5 4 3 2 1 0 Bit n...

Страница 97: ...0 0 The pump has not failed 1 1 The pump is at rest 2 0 Speed is below normal speed 3 0 The vent valve is open 4 0 There is no active start command 5 1 Serial enable is active 6 0 Standby is not acti...

Страница 98: ...tring 3 is the designated full speed of the pump in revolutions per second Reply s 8 5 1 sp String 1 String 2 String 3 cr Send the query that follows to find out the PIC software version Command s 8 6...

Страница 99: ...in its packing materials Seal the pump in a plastic bag with a applicable desiccant for fastest pump down when the pump is put back into service 3 Store the pump in cool dry conditions Make sure that...

Страница 100: ...hale the particulates which can be in the pump Do not incinerate the pump A HS2 form must be completed if returning the pump to us Dispose of the pump components and accessories safely and in accordan...

Страница 101: ...ed repaired or rebuilt is returned with a full warranty The local Service Centres can also give our engineers to support on site maintenance service or repair of equipment For more information about s...

Страница 102: ...e by a service engineer trained by us The service tool kits and service parts that follows are available Table 40 Service tool kits Service tool kit Item number Bearing exchange tooling kit B8G200845...

Страница 103: ...the interstage port Table 43 Inlet strainers Flange Size Inlet Screen DN25ISO K A22305067 12 3 Inlet flange seals and integrated inlet screens The pumps are supplied with an inlet seal Table 44 Inlet...

Страница 104: ...The pumps are supplied with a NW16 backing port and a NW16 or NW25 interstage port Table 45 NW16 and NW25 ports Port Item Number NW25 B80000809 NW16 B80000806 07 2021 Edwards Limited Page 104 B8G0008...

Страница 105: ...ailable with a pre wired connector which connects to an auxiliary port on the controller or with a bare wire An air cooler can be installed to the pump Refer to Forced air cooling on page 60 to check...

Страница 106: ...bare wire option All vent valves have an 0 5 mm diameter orifice and are applicable to vent small vacuum systems of less than 5 litres The vent valves are pre wired to Vent Option 1 and the default is...

Страница 107: ...purge gas and restricts its flow rate to the recommended flow of 25 sccm Install a vent port adaptor to the purge port to connect a purge restrictor to the pump Table 52 PRX purge restrictor Item Ite...

Страница 108: ...il to us 13 10 Auxiliary connector The auxiliary connector enables the use of accessories that are not pre wired with a mating plug Cable length is 1 5 m Table 54 Auxiliary connector Item Item Number...

Страница 109: ...an be used in the same way as the auxiliary connector on the pump Table 56 Auxiliary extension cable Item Item Number nEXT 55 85 auxiliary Y cable adaptor B8G200837 13 13 Base mounting adaptor A base...

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Страница 111: ...sions Industrial Immunity 2011 65 EU Restriction of certain hazardous substances RoHS directive as amended by Delegated Directive EU 2015 863 Based on the relevant requirements of harmonised standards...

Страница 112: ...l Immunity Restriction of the Use of Certain Hazardous Substances in Electrical and Electronic Equipment Regulations 2012 Relevant designated standards or technical specifications are as follows EN IS...

Страница 113: ...clarified under the 2015 European Court of Justice ruling in case C 106 14 Lead Pb This substance is present in Brass pipe fitting Brass connectors China Material Content Declaration Hazardous Substan...

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Страница 116: ...edwardsvacuum com...

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