Edwards nEXT 55, Инструкция по эксплуатации

Страница: 34 / 116

Table 12
Maximum continuous backing pressure nEXT85D at zero inlet flow
Gas Type: N
2
Cooling method
Ambient Temperature
20 ᵒC 30 ᵒC 40 ᵒC
Backing Pressure (mbar)
Natural convection 6 3.2 0.6
Force air cooling 18 14 11
Water cooling
* 13 11.5 10
*
Cooling water temperature of 15 ᵒC at a flow rate of 15 l hr
-1
Values for maximum continuous backing pressure are taken under no inlet gas flow
conditions, at sea level, in negligible magnetic field, with 120 W power limit setting.
Refer to
Cooling on page 59 for cooling conditions. At pressures above these, the
rotational speed decreases below nominal.
Table 13
Maximum continuous inlet pressure/throughput nEXT85D - Nitrogen
Gas Type: N
2
Cooling
method
Ambient Temperature
20 ᵒC 30 ᵒC 40 ᵒC
Through-
put (sccm)
Inlet Pres-
sure (mbar)
Through-
put (sccm)
Inlet Pres-
sure
(mbar)
Throughput
(sccm)
Inlet Pressure
(mbar)
Natural
convection
15 3.6e-03 12 2.9e-03 7 1.6e-03
Force air
cooling
95/80
*
3.8e-02/
2.9e-02
*
72 2.5e-02 37 1.0e-02
Water
cooling
§
50 1.5e-02 45 1.3e-02 40 1.1e-02
*
Based on 80 W power limit setting
§
Cooling water temperature of 15 ᵒC at a flow rate of 15 l hr
-1
Values for maximum continuous inlet pressure / throughput are taken using a nXDS20i
backing pump, at sea level, in negligible magnetic field, with 120 W power limit setting.
Refer to
Cooling on page 59 for cooling conditions. At pressures above these, the
rotational speed decreases below nominal. Values are given without inlet screen.
07/2021 - ©Edwards Limited Page 34 B8G000880_E
B8G000880_E - Technical data