Edwards iXM Series, Инструкция по эксплуатации

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5. Commission
5.1 Commission the system
WARNING: USE PROTECTIVE EQUIPMENTS
Risk of injury. During some application cycles the system can possibly exceed OSHA
1910.95 Occupational Noise Exposure Limits, the EU noise directive 2003/10/EC or
other regional noise limits. The noise level depends upon the process, duty cycle,
installation or environment in which the system is being operated. A sound pressure
survey must be conducted after installation. If necessary, set up controls to make
sure that the relevant limits are not exceeded during operation and that precautions
are taken to prevent personnel from exposure to high noise levels during operation.
WARNING: HOT SURFACES
Risk of burn injury. The pump exhaust will heat up when the pump is in operation. Do
not touch the pump surface.
Refer to Figure: Front panel controls :
1. Switch on the external electrical supply and check that the POWER LEDs illuminate.
If the Light-Emitting Diodes (LEDs) do not illuminate, contact us.
2. Switch on the cooling water and nitrogen supplies.
3. Make sure that the exhaust extraction system is not blocked (for example, that
valves in the exhaust extraction system are open).
4. Make sure that all openings to atmospheric pressure in the foreline vacuum system
are closed.
5. Press the Local Control button and check that the green Local Control LED
illuminates and then remains continuously illuminated.
6. Press Start button.
7. If the dry pumping system starts and continues to operate, continue at Step 8. If a
warning or alarm condition is indicated:
▪ Shut down the system: refer to Shut down on page 62.
▪ Contact us.
8. Monitor the pressure gauge in the inlet pipeline:
▪ If the pressure is increasing, immediately shut down the system and contact
us.
▪ If the pressure is decreasing continue at Step 9.
9. After commissioning the system:
▪ To continue to operate the system, refer to Start-up on page 59.
▪ Otherwise, shut down the system, refer to Shut down on page 62.
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M56635880_D - Commission