(
xi)
EBARA
Corporation
4.3.3 Control Signal Wiring....................................................................20
5. Power Supply for the Options ...................................................................23
6. LCD Controller ............................................................................................24
6.1 LCD Outline...........................................................................................24
6.2 LCD Indication ......................................................................................25
6.3 Setting the operational mode ..............................................................29
6.3.1 Setting the pump operation control mode ..................................31
6.3.2 Setting the DIP switch...................................................................32
6.3.3 Setting the WARNING value for the pump N2 flow.....................33
6.3.4 Setting the WARNING value for the back pressure (option)......33
6.3.5 Setting the WARNING value for the water flow...............................34
6.4 Dip Switch .............................................................................................35
6.5 DIP Switch setting display...................................................................39
6.6 Starting/stopping the pump with the LCD controller ........................41
7. Operation.....................................................................................................42
7.1 Before Starting......................................................................................42
7.2 START/STOP.........................................................................................45
7.2.1 LOCAL (Pump Side) Start/Stop ........................................................46
7.2.2 REMOTE Start/Stop ...........................................................................47
7.2.3 Communication Start/Stop ...............................................................48
8. Maintenance and Inspection......................................................................49
8.1 Internal energies...................................................................................49
8.1.1 Power source .....................................................................................49
8.1.2 Cooling water.....................................................................................49
8.1.3 Nitrogen gas.......................................................................................49
8.2 Routine Inspection ...............................................................................50
8.3 Vacuum and Exhaust Piping ...............................................................52
8.4 Lubricant Oil .........................................................................................53
8.5 Spare (Maintenance) Parts List ...........................................................57
8.6 List of wastes during maintenance.....................................................58
8.7 Overhaul ................................................................................................59
9. Disconnection and Transportation............................................................60
10. Troubleshooting........................................................................................62
10.1 Troubleshooting (1) Basic trouble ....................................................62
10.2 Troubleshooting (2) WARNING..........................................................63
10.3 Troubleshooting (3) ALARM ..............................................................66
10.4 Troubleshooting (4) Option ...............................................................69