EBARA ESA70W, Инструкция по эксплуатации, Страница: 46 / 82

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EBARA
Corporation
6.3.3 Setting the WARNING value for the pump N2 flow
6.3.4 Setting the WARNING value for the back pressure (option)
“ ▲ ” “ ▼ ” Use the up down arrow keys to change the setting value.
“ ▲ ” : Increase the setting value by 0.1 Pam
3
/s
“ ▼ ” : Decrease the setting value by 0.1 Pam
3
/s
Upper limit : 81.0 Pam
3
/s
Lower limit : 2.2 Pam
3
/s(PUMP N2 LOW)/1.0 Pam
3
/s(N2 0MODE)
Factory setting : 16.4 Pam
3
/s(PUMP N2 LOW)/7.4 Pam
3
/s(N2 0MODE)
Reset value for WARNING : Set value+1.0 Pam
3
/s
N2 FLOW LOW
##.# Pam3/s SET POINT
N2 WARNING?
PRG.
PRG.
ENTER ENTER
SET POINT
N2 0MODE?
SET POINT
PUMP N2
LOW?
Setting
Completed ENTER
N2 0MODE
##.# Pam3/s
▼
▲
ENTER
ENTER
Setting
Completed
▼
“ ▲ ” “ ▼ ” Use the up down arrow keys to change the setting value.
“ ▲ ” : Increase the setting value by 0.5 kPa
“ ▼ ” : Decrease the setting value by 0.5 kPa
Upper limit : 30.0 kPa
Lower limit : 5.0 kPa
Factory setting : 20.0 kPa
Reset value for WARNING : Set value -2.0 kPa
BACK PRES. SP
##.# kPa SET POINT
BACK PRESSURE?
PRG.
ENTER
ENTER
SET POINT
PUMP N2 LOW?
Setting
Completed
ENTER