(
25)
EBARA
Corporation
6.2 LCD Indication
The operating status of the pump is displayed on the LCD display of the controller.
For details of display, see Tables 6.1.
Table 6.1 LCD controller indication
No ITEM
INDICATION
B P :
# # .
# # A
1
Current
M P :
# # .
# #
A
C
O N T R O L :
L O C A L
2
Control mode
Pump running mode
M O D E :
N O R M A L
A L A R M /
W A R N I N G
3
Alarm history
(Indication of history)
H
I
S T O R Y ?
U
N I
T
N O .
4
Pump unit No.
& & & & & & & &
P U M P. T Y P E @
@
@
@
5
Pump model
Voltage
@ @ @ @ @ @
O
P E .
T I
M E
6
Total operation time
# # # # # h
B A C K P R E S S U R E
7
Back pressure (option)
# # .
#
k P a
P U M P N 2 F L O W
8
Pump N2 gas flow
# # .
#
P a m
3
/
s
W A T E R F L O W
9
Cooling water flow
# # .
#
L / m i
n
B P S P E E D
10
Motor speed
# .
# k m
i n - 1
$ $ $ $ $ :
$ $ $ $ $ $ $ %
11
WARNING/ALARM
$ $ $ $ $ $ $ $ $ $ $ $ $ $