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EBARA

Corporation

Table 6.2 Alarm code list

Code

ALARM name

1st

code

2nd

code

WARNING name

1st

code

2nd

code

MP casing temp. high

Cooling water flow low

BP motor temp. high

MP casing temp. high

MP motor temp. high

BP oil level low

MP no current

MP oil level low

BP no current

Pump box temp. high

Backpressure high(

▲

)

Pump N

flow low

Phase error

Back pressure high(

▲

)

Emergency off(

▲

)

Back pressure sensor damaged(

▲

)

EXT. interlock

IO communication error (IO board)

IO communication error

IO communication error (C_IO board)

MP current high

BP current high

31 14

“

▲

” indicates that the item is optional.

Содержание ESA70W

Страница 1: ...nd understand this INSTRUCTION MANUAL thoroughly before using this equipment Be sure to keep this INSTRUCION MANUAL on hand for future reference To Facility and Tool Manufactures Be sure to distribute...

Страница 2: ...ion of this manual without permission Manufacturer reserves the right to discontinue or change any specifications or designs without notice and without incurring obligations Model OOO in this catalog...

Страница 3: ...te harmony between technology and nature prevent environmental pollution and improve the overall results of our environmental management activities We are aware that environmental protection and manag...

Страница 4: ...ents issued by EBARA in detail If you have any questions on pump operation safety or maintenance please does not hesitate to contact EBARA directly Refer to Global network for contact address Three te...

Страница 5: ...itch on the power supply to the pump until work is completed and pump and piping are returned to safe operating condition WARNING Supply N2 gas to the exhaust piping when necessary to dilute the flamm...

Страница 6: ...e sure that pump and exhaust piping do not come in contact with humans or inflammable substances Do not remove pump enclosure panels during operation WARNING Check Safety Interlock functions periodica...

Страница 7: ...v EBARA Corporation CAUTION Never operate the pump without pump cover for safety...

Страница 8: ...ure warning Hot surface may burn or cause injury Allow the piping and casing to cool before servicing 2 Hazardous voltage warning Hazardous Voltage may shock burn or cause death Turn power off and loc...

Страница 9: ...pump Raise all adjuster feet fully when moving WARNING Hazardous Materials Exposure to air may cause spontaneous fire or explosion Inhalation or skin absorption will cause severe injury or death by p...

Страница 10: ...temperature eyebolt warning Hot surface may burn or cause injury Allow the eyebolt to cool before servicing WARNING Hot Surfaces Will Cause burn Do not touch eyebolts during pump running for some tim...

Страница 11: ...of the warranty beyond the original period For repairs not covered under this Warranty EBARA will charge the customer for parts and labor Exclusions and Limitations This Warranty does not cover the fo...

Страница 12: ...3 Cooling Water 4 3 1 4 Exhaust 4 3 2 Control System 4 3 2 1 Warning 4 3 2 2 Operation Status Control 5 3 3 The way of pump moving 5 3 3 1 Preparation 5 3 3 2 Moving method 6 3 4 Detailed Specificatio...

Страница 13: ...ting stopping the pump with the LCD controller 41 7 Operation 42 7 1 Before Starting 42 7 2 START STOP 45 7 2 1 LOCAL Pump Side Start Stop 46 7 2 2 REMOTE Start Stop 47 7 2 3 Communication Start Stop...

Страница 14: ...ed 2 Introduction 2 1 Introduction Check the following items on receipt of the pump package 1 Check that the nameplate affixed to the outer cover of the pump to confirm that the pump supplied agrees w...

Страница 15: ...cally to operate the unit efficiently 3 To dispose the unit follow effective laws and ordinances applicable in the area where the unit is installed 4 To dispose the lubricant oil and chemicals follow...

Страница 16: ...n unharmful level Properly connect the nitrogen gas line to the purge port provided according to the instructions in Table 3 1 and the descriptions in Section 4 2 3 In the cases the gas concentration...

Страница 17: ...condition of each utility and pump section During pump operation all operating conditions are monitored including power supply cooling water flow N2 gas flow and motor coil temperature motor speed an...

Страница 18: ...RR A AA AAS series based on SEMI standard E73 3 2 2 Operation Status Control The sensor data are displayed on the LCD display provided on the controller to facilitate operation status control and dail...

Страница 19: ...ersons shall move the pump by pushing its terminal portion alternately as directed below A B If pump needs to be moved on steps or ditches spread steel plate or the like which can sustain the pump wei...

Страница 20: ...ng Water Temperature Max 30 deg C Connection 1 4 Tube Fitting Same as Swagelock or equivalent Pressure Supply 0 1 0 7Mpa Gauge Press Setting 0 04 0 07Mpa Approx Flow rate 24 27 Pam3 s N2 Gas N2 0 Mode...

Страница 21: ...8 EBARA Corporation...

Страница 22: ...rformance Curve Model ESA70W 1 10 100 1000 10000 0 1 1 10 100 1000 10000 100000 Inlet Pressure Pa Pumping Speed L min at 50Hz 1 10 100 1000 10000 0 1 1 10 100 1000 10000 100000 Inlet Pressure Pa Pumpi...

Страница 23: ...erformance Curve Model ESA70WN 1 10 100 1000 10000 0 1 1 10 100 1000 10000 100000 Inlet Pressure Pa Pumping Speed L min 1 10 100 1000 10000 0 1 1 10 100 1000 10000 100000 Inlet Pressure Pa Pumping Spe...

Страница 24: ...rter Gas Outlet N2 Gas Flow Sensor FT1 Pressure Gauge P Regulator N2 Gas Motor Main Pump MP Control LCD Controller Control Circuit Cooling Water Flow Sensor FT2 Water Connector Motor Starter Motor Mai...

Страница 25: ...e pump the distance between pump and interface box shall be 3m or less CAUTION Install pump in a location at an ambient not exceeding 30 Particular caution is required when the pump is operated in an...

Страница 26: ...ump or place objects on it 1 To fix the pump turn the adjusters to the right to lower them 2 Adjust the height of the feet evenly to ensure that the pump base is level The difference in height between...

Страница 27: ...r may be installed c The weight of the pipes attached to the pump can cause misalignment and leaks from the flange connections Be sure therefore to support the piping properly and not to apply undue f...

Страница 28: ...tee Turbidity pH Alkalinity CaCO3 Hardness CaCO3 Evaporation residue Chlorine ion Iron Manganese ppm ppm ppm ppm ppm ppm ppm 20 6 5 8 0 75 120 250 80 0 3 0 2 Correct Wrong Socket Plug In Out Marking S...

Страница 29: ...when water droplets can be detected on the outer surface of the pump cooling water piping as this suggests the possibility of dew condensation in the pump 4 2 3 N2 Gas Piping Cut tube at right angles...

Страница 30: ...to ventilate through the ventilation duct when the pump is used to exhaust toxic and or inflammable gases Do not combine the ventilation duct with the pump exhaust piping CAUTION Even when the pump is...

Страница 31: ...rrent This product is equipped with a cord having a grounding wire with an appropriate grounding plug The plug must be plugged into an outlet that is property installed and grounded in accordance with...

Страница 32: ...source side Wire the connector for the main power supply Fig 4 4 and Tables 4 2 and 4 3 show the connector pin assignment Table 4 3 Terminal Block Specification Pump model Model ESA70W N Receptacle ty...

Страница 33: ...299 CN Y 25 pin D sub miniature Female receptacle Fig 4 5 15 Pin D Sub Miniature Female Receptacle As seen from connecting side Table 4 5 Control Connector Pin Assignment CN Z Pin No Signal name I O S...

Страница 34: ...UMP N2 WARNING STATUS OUT Abnormality CLOSE Alternate 2 8 RESERVED OUT 9 RESERVED IN 10 BACK PRESSURE HIGH WARNING STATUS 1 OUT Abnormality CLOSE Alternate 2 11 RESERVED OUT 12 RESERVED OUT 13 14 RESE...

Страница 35: ...Y Signal Contacts Input Signal 12VDC 1k Open Collector Pump side Circuit Customer s connection Dry Contact 10mA Min Output Signal 100mA Max Pump side Circuit Customer s connection Open Collector 4VDC...

Страница 36: ...ut signals are used to energize an inductive load such as a relay be sure to insert a diode 100V 1A class in order to absorb the back electromotive force due to surge currents 5 Power Supply for the O...

Страница 37: ...ication RESET For resetting WARNING and ALARM BZ OFF For buzzer mute in WARNING ALARM PRG For changing screen of pump status and change hierarchy of screen ENTER For using at DIP switch selection And...

Страница 38: ...L L O C A L 2 Control mode Pump running mode M O D E N O R M A L A L A R M W A R N I N G 3 Alarm history Indication of history H I S T O R Y U N I T N O 4 Pump unit No P U M P T Y P E 5 Pump model Vo...

Страница 39: ...plays details of WARNING ALARM 4 Total pump operating time gives the total hours of operation after shipment from the factory 5 The display will return to the electrical power and motor rotation speed...

Страница 40: ...N2 gas flow Cooling water flow Casing temp Motor speed 002 51 00 020901 12 25 26 Occurrence date History No The lower number is newer Analog value Alarm 2nd code Alarm 1st code How to read the alarm...

Страница 41: ...level low 06 00 MP no current 60 00 MP oil level low 08 00 BP no current 61 00 Pump box temp high 13 00 Backpressure high 63 00 Pump N2 flow low 18 01 Phase error 64 00 Back pressure high 21 01 Emerge...

Страница 42: ...SET CONTROL MODE Switches the control modes local remote communication DIP switch setting SET DIP SW To set DIP switchs see 6 4 Pump N2 WARNING setting SET POINT PUMP N2 WARNING Sets the WARNING valu...

Страница 43: ...tting the pump operation control mode Setting the DIP switch Setting the WARNING value for the back Pressing the key PRG for 3 sec or more when the status screen is displayed switches to the operation...

Страница 44: ...signals LOCAL MODE Enables the local operation start stop with the LCD controller COM MODE Enables the communication operation start stop with RS232C communication The mode that is currently not set i...

Страница 45: ...eys and turn On and OFF the DIP switch The key BZ OFF switches the selection from 1 to 8 A1 ON OFF SET DIP SW ENTER ENTER SET DIP SW C SET DIP SW A C1 ON OFF ENTER SETTING COMPLETED A1 DATA LENGTH 8BI...

Страница 46: ...N2 LOW 7 4 Pam3 s N2 0MODE Reset value for WARNING Set value 1 0 Pam3 s N2 FLOW LOW Pam3 s SET POINT N2 WARNING PRG PRG ENTER ENTER SET POINT N2 0MODE SET POINT PUMP N2 LOW Setting Completed ENTER N2...

Страница 47: ...0 1 L min Upper limit 19 0 L min Lower limit 3 0 L min Factory setting 3 0 L min Set Water Dly Increase the setting value by 1 sec Decrease the setting value by 1 sec Upper limit 60sec Lower limit 5 s...

Страница 48: ...stop signal Alternate Level Momentary Pulse OFF 6 7 Dilution N2 mode Standard mode Dilution N2 0 mode OFF 8 BP operation in Remote Automatic operation External signal input OFF Optional Table 6 5 Dip...

Страница 49: ...4 When the toggle switch is moved from the LOCAL to the REMOTE position dip switch A No 4 lets you select PUMP START STOP in Response to External Start Signal According to Signal or PUMP STOP Regardl...

Страница 50: ...odd seconds until the flow has stabilized after you have operated the N2 gas selector valve DIP SW A No 8 When dip switch A No 8 has been set to the REMOTE Remote Operation position it is possible to...

Страница 51: ...PUT Dip switch No MODE OFF ON 1 B1 NO ASSIGNED B1 NO ASSIGNED 2 B2 NO ASSIGNED B2 NO ASSIGNED 3 B3 NO ASSIGNED B3 NO ASSIGNED 4 B4 NO ASSIGNED B4 NO ASSIGNED 5 B5 NO ASSIGNED B5 NO ASSIGNED 6 Remote I...

Страница 52: ...ip and alarm BZ OFF This switches the dip switch numbers This sets the selected dip switch ON This sets the selected dip switch OFF ENTER This indicates the next page of the display DIP Switch A DIP S...

Страница 53: ...med the LCD controller counts down 10 seconds the same as at the power on state right after the completion of the parameter setting NOTE If any warning or alarm occurs during the parameter setting the...

Страница 54: ...roller of which LED LOCAL is lit on has precedence over the other to control the start and stop operation If only one controller is connected the controller starts and stops the pump One controller co...

Страница 55: ...ctions Slowly turn the pressure adjustment knob clockwise to set the pressure gauge pressure to 0 05 MPa first Then press the red stopper to lock the knob in position WARNING Be sure to purge with N2...

Страница 56: ...gas selector valve 3 Turn on the power supply to the pump 4 The LCD controller counts down 10 seconds after placing the Earth Leakage Breaker ELB into the ON position NOTE The pump cannot start while...

Страница 57: ...s will occur when the pump is operated with the valve closed as the exhaust pipe will be pressurized 9 Checking the sense of pump motor rotation Look through the sight glass for monitoring the rotatio...

Страница 58: ...tion CAUTION When the production process leads to react by products in the pump or when the process handles corrosive gases be sure not to stop the pump until after at least 30 minutes of stopping the...

Страница 59: ...the START button on the controller The Main Pump MP will start and the M P RUN lamp on the controller will light After this the Booster Pump BP will start automatically and the B P RUN lamp on the con...

Страница 60: ...when inlet pressure is below 4000 Pa or less The BP doesn t start if it doesn t meet this pressure condition The current is indicated on the display during pump operation For other status display indi...

Страница 61: ...is below 4000 Pa or less The BP doesn t start if it doesn t meet this pressure condition The current is indicated on the display during pump operation For other status display indications refer to Ta...

Страница 62: ...water at pressure of maximum 0 4 MPa Disconnection of the cooling water resulted from improper handling may cause electrification and unit damage For service and transportation unplug the cooling wate...

Страница 63: ...lower limit line of the oil level gauge supply the lubrication oil See the section 8 3 Lubrication oil when adding the oil WARNING Switch off the power supply to the pump first and interrupt the Earth...

Страница 64: ...ycle CAUTION When a ALARM signal has been generated in the REMOTE operating mode do not start the maintenance tasks until you have interrupted the external start signal When the external ALTERNATE sta...

Страница 65: ...of air into the pump When checking for gas leaks by pressurization please pressurize by less than 0 05 MPa into the purge port and do check Toxic gases may be generated from by products in the piping...

Страница 66: ...evel is lower than the lower limit line of the oil level gauge in daily inspection and maintenance supply the oil is needed Follow the steps below to supply the oil 1 Stop the pump and remove the oute...

Страница 67: ...port positions Oil filler port Oil drain port Window of the gauge Oil drain port Oil filler port Window of the gauge Oil drain port Oil reservoir Oil drain port Oil filler port Window of the gauge Oil...

Страница 68: ...ON When the lubrication oil level exceeds the upper limit the oil may leak to the pump side Thus be sure not to exceed the upper limit line when adding the oil CAUTION When the lubrication oil level i...

Страница 69: ...tch C 5222 005 0011 Oil level gauge C 5222 004 0001 Water flow sensor 10 L min C 5137 008 0001 N2 flow sensor 84 4 Pa m3 s C 5138 062 0111 Thermo couple sensor bolt T TYPE M8 C 1019 121 0001 N2 gas pr...

Страница 70: ...al regulations in each area Table 8 4 List of wastes during maintenance Part Equipped on Remarks Lubricant oil Inside of pump module See section 8 4 Refer to Appendix 1 2 or Material Safety Data Sheet...

Страница 71: ...se factories equip special tools sufficient evacuation duct Contact EBARA Sales office or Overhaul service center for detail To avoid dangers potentially encountered during pump overhauls follow instr...

Страница 72: ...e values specified using appropriate measurement equipment Without assurance of gas safety instruct the workers to wear proper personnel protective equipment if necessary to protect them from gas haza...

Страница 73: ...nsuring that the slinging angle remains symmetrically centered CAUTION In case of sling and transportation be sure not to remain leaning more than 10 deg against a horizontal for 5 minutes If not oil...

Страница 74: ...ation and for some time after stopping Be sure that pump and exhaust piping do not come in contact with humans or inflammable substances Do not remove the pump cover during operation WARNING Check for...

Страница 75: ...ote Alternate mode has been selected Pump jogs Enter Alternate start signal input Set to Momentary mode MP does not start when entering external MP start signal input Instrument failure Replace instru...

Страница 76: ...some time after stopping Be sure that pump and exhaust piping do not come in contact with humans or inflammable substances Do not remove the pump cover during operation WARNING Check for gas leaks af...

Страница 77: ...emp rises Motor failure Replace or overhaul pump Connection error of the instrumented units Check the connection of the instrumented unit WARN BP COMM ERROR WARN IO COMM ERROR Communication is not est...

Страница 78: ...some time after stopping Be sure that pump and exhaust piping do not come in contact with humans or inflammable substances Do not remove the pump cover during operation WARNING Check for gas leaks aft...

Страница 79: ...MOTOR STEP OUT Booster Pump BP motor step out Instrument failure Replace instrument Insufficient ventilation Ventilate sufficiently Cooling water flow rate is reduced Cool pump thoroughly and reset A...

Страница 80: ...ARM signal still remains the ALARM display will appear again even after you have reset During REMOTE operation carry out the above procedures after you have turned off the external start signal When t...

Страница 81: ...he pump When checking for gas leaks by pressurization please pressurize by less than 0 05 MPa into the purge port and do check Display Symptom Check Item Corrective Action Tube fittings are loosened R...

Страница 82: ...ARM signal still remains the ALARM display will appear again even after you have reset During REMOTE operation carry out the above procedures after you have turned off the external start signal When t...

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