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59)
EBARA
Corporation
9. Disconnection and Transportation
WARNING
When the pump has been used for exhausting highly toxic gases such as arsenic
and mercury compounds, be sure to contact EBARA Corporation before you
return the pump. Refer to Appendix 4 and 5 for the format required when
customer returns their pump to Ebara service center for overhaul or rebuild.
CAUTION
In the interest of safety during the transportation, disassembly and cleaning of the
pump be sure to take note of the gases that have been handled.
Toxic gases may be generated from by-products in the piping or pump in pump
disconnection from the tool piping for repair and replacement or flange removal for
maintenance. Gain relevant information about the process gases from your tool
suppliers, and be sure that the gas concentrations in the work areas are at quarter
or under the acceptable values specified using appropriate measurement
equipment.
Without assurance of gas safety, instruct the workers to wear proper personnel
protective equipment if necessary to protect them from gas hazards. The
personnel protective equipment must include at least gloves, safety goggles, and
a gas mask.
To disconnect and transport the pump, proceed as follows.
(1)
Stop the pump and replace all gases inside the pump by purging them
with N2 gas.
(2)
Switch off the power supply to the pump and remove the power and signal
cables.
(3)
After you have fully closed the N2 regulator remove the N2 pipe, seal off
the N2 purge port with a sealing flange.
(4)
Remove the cooling water pipes.
(5)
Remove the vacuum and exhaust pipes and completely seal off the
suction and exhaust ports of the pump with a blind flange or similar seal.
Seal off all process gas discharge points such as the differential port by
using a blind flange.
(6)
Turn the operating panel of the controller downward and attach the
controller to the outer pump cover with adhesive tape.
(7) Wrap the pump in a vinyl sheet.