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DC-ITD-CL4andCL8MAN01.A
www.dodtec.com
NOV 2018
815-788-5200
CL4 & CL8 Manual
Low Level Hydrides
PH3
PH3(0-300)ppb
4.8
300
50
100
1-300-012
MIC
MIC
MIC(0-100)ppm
3.7
100
10
20
1-600-010
NO2
NO2
NO2(0-100)ppm
0.3
100
3
6
1-600-511
Oxidizers
CL2
CL2(0-3200)ppb
50.1
3200
500
1000
1-550-010
Oxidizers
NO2
NO2(0-30)ppm
1.3
30
3
6
1-550-010
Oxidizers
F2
F2(0-3200)ppb
105.6 3200
1000
2000
1-550-010
Pyrolyzer - M/A
C5F8
C5F8(0-15)ppm
0.5
15
2
4
1-400-014
Pyrolyzer - M/A
NF3
NF3(0-15)ppm
0.5
15
2
4
1-400-014
Velcorin
DMDC
DMDC(0-200)ppb
8.8
200
40
80
1-200-030