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Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's

Contents

Installation and Operation Manual

X-TMF-SLA6900-SLA6800-MFC-eng

Part Number: 541B100AAG

August, 2009

Figures

Figure

Page

Number

1-1

Model SLA6950/SLA6850 Series MFC Dimensions ........................................................................ 1-5

1-2

Model SLA6960/SLA6860 Series MFM Dimensions ........................................................................ 1-6

1-3

Model SLA6950/SLA6850 Series Digital I/O DeviceNet MFC's ....................................................... 1-7

2-1

D-Connector Shielded Cable Hookup Diagram - Voltage I/O Versions ............................................ 2-6

2-2

Common Electrical Hookups ............................................................................................................ 2-6

3-1

Flow Sensor Operational Diagram (VCR

End Connections Shown) ............................................. 3-2

3-2

Externally Accessible Adjustment ..................................................................................................... 3-3

3-3

Flow Control System Block Diagram (MFC Only) ............................................................................ 3-6

4-1

Bench Troubleshooting Circuit ......................................................................................................... 4-4

4-2

Model SLA6950 Orifice Sizing Nomograph ..................................................................................... 4-14

4-3

Example Nomograph ...................................................................................................................... 4-15

Tables

Table

Page

Number

2-1

Recommended Filter Size ................................................................................................................ 2-4

3-1

Typical Resistor Values for Calibration Select .................................................................................. 3-5

4-1

Bench Troubleshooting for MFC/MFM ............................................................................................. 4-4

4-2

Sensor Troubleshooting ................................................................................................................... 4-5

4-3

Orifice Capacities ............................................................................................................................. 4-6

4-4

Conversion Factors (Nitrogen Base) ............................................................................................... 4-11

4-5

Model SLA6900/SLA6800 Series Standard Restrictors .................................................................. 4-16

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Содержание SLA6800 Series

Страница 1: ...service in house repair center WE BUY USED EQUIPMENT Sell your excess underutilized and idle used equipment We also offer credit for buy backs and trade ins www artisantg com WeBuyEquipment REMOTE IN...

Страница 2: ...t Number 541B100AAG August 2009 Brooks Delta Class SLA6900 Series UHP and SLA6800 Series Metal Seal Mass Flow Controllers and Meters Model SLA6950A Analog I O Mass Flow Controller Model SLA6950D Digit...

Страница 3: ...ult in fire electrical hazards or improper operation Ensure that all equipment doors are closed and protective covers are in place except when maintenance is being performed by qualified persons to pr...

Страница 4: ...dical devices analytical instrumentation semiconductor manufacturing and more The Brooks product you have just received is of the highest quality available offering superior performance reliability an...

Страница 5: ...aled MFC s MFM s Installation and Operation Manual X TMF SLA6900 SLA6800 MFC eng Part Number 541B100AAG August 2009 THIS PAGE WAS INTENTIONALLY LEFT BLANK Artisan Technology Group Quality Instrumentat...

Страница 6: ...Gas Connections 2 3 2 7 Installation 2 3 2 8 In Line Filter 2 4 2 9 Electrical Interface 2 4 2 10 Operation Check Procedure 2 5 Section 3 Operation 3 1 Overview 3 1 3 2 Theory of Operation 3 1 3 3 Fea...

Страница 7: ...1 Flow Sensor Operational Diagram VCRTM End Connections Shown 3 2 3 2 Externally Accessible Adjustment 3 3 3 3 Flow Control System Block Diagram MFC Only 3 6 4 1 Bench Troubleshooting Circuit 4 4 4 2...

Страница 8: ...oducts This manual is organized into the following sections Section 1 Introduction Section 2 Installation Section 3 Operation Section 4 Maintenance Section A CE Certification It is recommended that th...

Страница 9: ...scale Repeatability 0 20 of rate Temperature Sensitivity Zero Less than 0 075 F S per C Span Less than 1 F S shift over 10 50 C range Settling Time Less than 800 ms to within 2 full scale of final val...

Страница 10: ...ls of Construction SLA6800 Series 316L Vacuum Arc Remelt VAR 316L and high alloy ferritic stainless steel External internal seals Nickel Valve seat 316L stainless steel standard Internal Wetted Surfac...

Страница 11: ...min Flow Output Analog I O option only 0 5 Vdc into 2K ohm minimum load Output will indicate process variable up to 6 Vdc 120 F S Valve Override Signal Analog I O option only Left floating unconnected...

Страница 12: ...ion Manual X TMF SLA6900 SLA6800 MFC eng Part Number 541B100AAG August 2009 Figure 1 1 SLA6950 SLA6850 Series Analog I O MFC Dimensions Anaolg I O D Connector 1 4 VCR Connections Analog I O D Connecto...

Страница 13: ...anual X TMF SLA6900 SLA6800 MFC eng Part Number 541B100AAG August 2009 Figure 1 2 SLA6960 SLA6860 Series Digital I O DeviceNet MFM Dimensions Digital I O DeviceNet Downport Connections Digital I O Dev...

Страница 14: ...al X TMF SLA6900 SLA6800 MFC eng Part Number 541B100AAG August 2009 Figure 1 3 Model SLA6950 SLA6850 Series Digital I O DeviceNet MFC Dimensions Digital I O DeviceNet 1 4 VCR Connections Digital I O D...

Страница 15: ...M s 1 8 Section 1 Introduction Installation and Operation Manual X TMF SLA6900 SLA6800 MFC eng Part Number 541B100AAG August 2009 THIS PAGE WAS INTENTIONALLY LEFT BLANK Artisan Technology Group Qualit...

Страница 16: ...de of your clean area carefully remove the equipment from the packing case Make sure spare parts are not discarded with the packing material Inspect for damaged or missing parts The SLA6900 SLA6800 UH...

Страница 17: ...DS for the fluid s used in the meter is required before any Brooks Personnel can begin processing the equipment Copies of the form can be obtained at the locations listed below Brooks Instrument 407 W...

Страница 18: ...Series MFM can be installed in any position However mounting in orientations other than the original factory calibration see calibration data sheet supplied with the instrument can result in a 0 5 max...

Страница 19: ...s MFM s are controlled using analog 0 5 Vdc signals The minimum set of connections which must be made to the Model SLA6950 SLA6850 MFC and Model SLA6960 SLA6860 MFM include 15 Vdc supply common and a...

Страница 20: ...Check the analog output signal The output voltage signal should match the setpoint voltage 20mV within 10 seconds after the setpoint is changed The Brooks electric electronic equipment bearing the CE...

Страница 21: ...Voltage I O Versions Analog I O Pin Connections Signal 15 pin D conn 9 pin D conn Setpoint Command Common 1 8 Flow Signal Out 2 2 15v 5 3 15v unused 6 9 Setpoint Command In 8 6 Power Supply Common 9...

Страница 22: ...ference versus flow relationship The ratio of sensor flow to the flow through the restrictor remains constant over the range of the MFC MFM A B constant The full scale flow rate of the MFC MFM is esta...

Страница 23: ...a variety of digital protocols for example DeviceNet The SLA6950 SLA6850 Series is capable of storing up to 10 different sets of gas calibration data Each set includes a calibration curve PID controll...

Страница 24: ...SLA6900 SLA6800 MFC eng Part Number 541B100AAG August 2009 customer order Model SLA6900 SLA6800 s containing a single calibration will have that calibration stored in calibration 1 Figure 3 2 External...

Страница 25: ...ilable in the instrument Unless otherwise specified a SLA6950 SLA6850 Series ordered with only one calibration will have that calibration stored in calibration 1 Before operating the SLA6950 SLA6850 S...

Страница 26: ...ds NOTE It is recommended to change calibrations during no flow conditions F Zeroing the MFC Self zero It may be desirable to re zero the flow sensor if it is operated at its temperature extremes or i...

Страница 27: ...6 Section 3 Operation Installation and Operation Manual X TMF SLA6900 SLA6800 MFC eng Part Number 541B100AAG August 2009 Figure 3 3 Flow Control System Block Diagram MFC only Artisan Technology Group...

Страница 28: ...oting 4 1 Overview No routine maintenance is required on the SLA6900 SLA6800 Series If an in line filter is used the filtering elements should be periodically replaced This section provides the follow...

Страница 29: ...lure of the flow rate or flow signal to achieve the setpoint could be caused by a number of factors 1 Insufficient pressure drop across the SLA6950 SLA6850 MFC low or no pressure If there is not enoug...

Страница 30: ...50 SLA6850 MFC performance is tuned during calibration at the conditions specified on the order If the conditions in use inlet and outlet pressure temperature attitude gas or mixture type are differen...

Страница 31: ...nments regardless of command and through the controller there is flow Defective printed circuit board Replace printed circuit board Setpoint input floating Connect command signal Refer to Section 2 10...

Страница 32: ...either heater 1 or Pin 1 or 4 to meter body sensor common 4 are shorted an ohmmeter reading will be obtained Pin 4 to Pin 2 Nominal 1100 ohms reading depending on Pin 4 to Pin 3 Pin 5 to Pin 1 Nominal...

Страница 33: ...ltiply the output reading by the ratio of the gas factor for the desired gas by the gas factor for the calibration gas used Example The controller is calibrated for Nitrogen The desired gas is Carbon...

Страница 34: ...dely from these reference conditions may cause an additional error due to the change in specific heat caused by pressure and or temperature 4 4 Orifice Sizing The Orifice Sizing Nomograph Figure 4 2 i...

Страница 35: ...n at 70 F GAS Density of the gas taken at customer temperature SGGAS Specific gravity of the gas taken at customer temperature Refer to Table 4 5 for densities Example Qgas 2 000 sccm 2 000 x 269 538...

Страница 36: ...he inlet pressure psia or If these conditions exist the pressure drop Dp should be calculated as follows Dp Pressure drop psi Pin Inlet pressure psia If these conditions do not exist pressure drop equ...

Страница 37: ...w characteristics will be altered and it must be cleaned or replaced It may also be necessary to replace the restrictor assembly when the mass flow controller is to be calibrated to a new flow rate Re...

Страница 38: ...818 4 134 Chlorodifluoromethane f 22 CHCLF2 0 505 1 770 3 906 Chloroform Trichloromethane CHCL3 0 442 2 066 5 340 Chloropentafluoroethane f 115 C2 CLF5 0 243 2 397 7 165 Chlorotrifluoroethylene C2 CL...

Страница 39: ...ton Kr 1 382 1 729 3 708 Methane CH4 0 763 0 763 0 717 Methylacetylene C3 H4 0 473 1 196 1 782 Methyl Bromide CH3 Br 0 646 1 834 4 236 3 Methyl 1 butene C5 H10 0 252 1 584 3 127 Methyl Chloride CH3 CL...

Страница 40: ...3 CH2 CH3 C3 H8 0 343 1 274 2 008 Propylene Propene C3 H6 0 401 1 234 1 875 Rhenium Hexafluoride ReF6 0 230 3 279 13 41 Silane SiH4 0 625 1 070 1 440 Silicon Tetrachloride SiCL4 0 310 2 465 7 579 Sili...

Страница 41: ...and Operation Manual X TMF SLA6900 SLA6800 TMF eng Part Number 541B100AAG August 2009 4 14 Section 4 Maintenance Troubleshooting Figure 4 2 Model SLA6950 Series Orifice Sizing Nomograph Artisan Techno...

Страница 42: ...Installation and Operation Manual X TMF SLA6900 SLA6800 MFC eng Part Number 541B100AAG August 2009 4 15 Section 4 Maintenance Troubleshooting Figure 4 3 Example Nomograph Artisan Technology Group Qua...

Страница 43: ...6 167 9 S110Z283BMG N 166 0 235 2 S110Z284BMG P 232 5 329 3 S110Z285BMG Q 325 4 460 9 S110Z286BMG R 455 7 645 3 S110Z287BMG S 638 0 903 4 S110Z288BMG T 893 2 1265 S110Z289BMG U 1250 1771 S110Z290BMG V...

Страница 44: ...rument 407 West Vine St Hatfield PA 19440 U S A Subject Nachtrag zur Bedienungsanleitung Referenz CE Zertifizierung f r Massedurchflu ger te Datum Januar 1996 Nach erfolgreichen Tests enstprechend den...

Страница 45: ...to the enclosed Instruction Manual Espa ol Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Asunto Addendum al Manual de Instrucciones Referencia Certificaci n CE de los Equipos de Caudal M...

Страница 46: ...sse toupes et des connecteurs Brooks fournit des c bles de haute qualit r pondant aux sp cifications de la certification CE Si vous approvisionnez vous m me ce c ble vous devez utiliser un c ble blind...

Страница 47: ...te voldoen aan de CE certificering Het scherm moet worden verbonden met aarde Voor pin configuraties a u b verwijzen wij naar het bijgesloten instruktie handboek Hoogachtend Italiano Brooks Instrumen...

Страница 48: ...inne i pluggen for m te CE sertifiseringskrav For tilkobling av medleverte plugger vennligst se h ndboken som h rer til utstyret Vennlig hilsen Portugu s Brooks Instrument 407 West Vine St Hatfield PA...

Страница 49: ...tojen liitt minen katso liitteen oleva manuaali Yst v llisin terveisin Svensk Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Subject Addendum to the Instruction Manual Reference CE certifi...

Страница 50: ...aled MFC s MFM s Installation and Operation Manual X TMF SLA6900 SLA6800 MFC eng Part Number 541B100AAG August 2009 THIS PAGE WAS INTENTIONALLY LEFT BLANK Artisan Technology Group Quality Instrumentat...

Страница 51: ...their application along with outstanding service and support to back it up We operate first class repair facilities located around the world to provide rapid response and support Each location utilize...

Страница 52: ...service in house repair center WE BUY USED EQUIPMENT Sell your excess underutilized and idle used equipment We also offer credit for buy backs and trade ins www artisantg com WeBuyEquipment REMOTE IN...

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