Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's
1-1
Section 1 Introduction
Installation and Operation Manual
X-TMF-SLA6900-SLA6800-MFC-eng
Part Number: 541B100AAG
August, 2009
1-1 Description
Thank you for purchasing a Brooks Instrument Delta Class Metal-Sealed
Mass Flow Product. This manual, X-TMF-SLA6900-SLA6800-MFC-eng is a
complete installation and operation manual for your instrument.
1-2 Purpose
The Brooks
®
SLA6900/SLA6800 Series are mass flow measurement devices
designed for accurately measuring (MFM's) and rapidly controlling (MFC's)
flows of gases. This instruction manual is intended to provide the user with all
the information necessary to install, operate and maintain these products.
This manual is organized into the following sections.
Section 1
Introduction
Section 2
Installation
Section 3
Operation
Section 4
Maintenance
Section A
CE Certification
It is recommended that this manual be read in its entirety before attempting to
operate or repair the SLA6900/SLA6800 Series.
1-3 Description
The Brooks SLA6960/SLA6860 Series Mass Flow Meters (MFM) are high
precision gas flow measuring devices. The SLA6950/SLA6850 Mass Flow
Controllers (MFC) are a complete, closed-loop system for controlling flow.
They are designed for use in advanced, ultra-clean gas handling systems
requiring deterministic performance, superior accuracy, and diagnostic
capabilities. These instruments feature ultra-polished internal surfaces
(SLA6900 Series) and all metal inboard and outboard seals (SLA6900 &
SLA6800 Series).
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