Brooks Instrument SLA6800 Series, Инструкция по установке и эксплуатации

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Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's
Installation and Operation Manual
X-TMF-SLA6900-SLA6800-MFC-eng
Part Number: 541B100AAG
August, 2009
4-11
Section 4 Maintenance
& Troubleshooting
Table 4-4 Conversion Factors (Nitrogen Base).
GAS NAME FORMULA SENSOR ORIFICE DENSITY (KG/m 3 )
FACTOR FACTOR @0°C, 1 atm
Acetylene C
2
H
2
0.615 0.970 1.173
Air Mixture 0.998 1.018 1.293
Allene C
3
H
4
0.478 1.199 1.787
Ammonia NH
3
0.786 0.781 0.771
Argon Ar 1.395 1.195 1.784
Arsine AsH
3
0.754 1.661 3.478
Boron Trichloride BCL
3
0.443 2.044 5.227
Boron Trifluoride BF
3
0.579 1.569 3.025
Bromine Pentafluoride BrF
5
0.287 2.502 7.806
Bromine Trifluoride BrF
3
0.439 2.214 6.108
Bromotrifluoroethylene C
2
BrF
3
0.326 2.397 7.165
Bromotrifluoromethane f-13B1 CBrF
3
0.412 2.303 6.615
1,3-Butadiene C
4
H
6
0.354 1.413 2.491
Butane C
4
H
10
0.257 1.467 2.593
1-Butene C
4
H
8
0.294 1.435 2.503
CIS-2-Butene C
4
H
8
0.320 1.435 2.503
Trans-2-Butene C
4
H
8
0.291 1.435 2.503
Carbon Dioxide CO
2
0.740 1.255 1.977
Carbon Disulfide CS
2
0.638 1.650 3.393
Carbon Monoxide CO 0.995 1.000 1.250
Carbon Tetrachloride CCL
4
0.344 2.345 6.860
Carbon Tetrafluoride f-14 CF
4
0.440 1.770 3.926
Carbonyl Fluoride COF
2
0.567 1.555 2.045
Carbonyl Sulfide COS 0.680 1.463 2.180
Chlorine CL
2
0.876 1.598 3.214
Chlorine Dioxide CLO
2
0.693 1.554 3.011
Chlorine Trifluoride CLF
3
0.433 1.812 4.125
2-Chlorobutane C
4
H
9
Cl 0.234 1.818 4.134
Chlorodifluoromethane f-22 CHCLF
2
0.505 1.770 3.906
Chloroform (Trichloromethane) CHCL
3
0.442 2.066 5.340
Chloropentafluoroethane f-115 C
2
CLF
5
0.243 2.397 7.165
Chlorotrifluoroethylene C
2
CLF
3
0.337 2.044 5.208
Chlorotrifluoromethane f-13 CCLF
3
0.430 1.985 4.912
Cyanogen (CN)
2
0.498 1.366 2.322
Cyanogen Chloride CLCN 0.618 1.480 2.730
Cyclobutane C
4
H
8
0.387 1.413 2.491
Cyclopropane C
3
H
6
0.505 1.224 1.877
Deuterium D
2
0.995 0.379 0.177
Diborane B
2
H
6
0.448 1.000 1.235
Diboromodifluoromethane f-12B2 CBr
2
F
2
0.363 2.652 8.768
1,2-Dibromotetrafluoroethane f-114B2 C
2
Br
2
F
4
0.215 2.905 10.53
Dichlorodifluoromethane f-12 CCL
2
F
2
0.390 2.099 5.492
Dichlorofluoromethane f-21 CHCL
2
F 0.456 1.985 4.912
Dichlorosilane SiH
2
CL
2
0.442 1.897 4.506
1,2-Dichloroethane C
2
H
4
Cl
2
0.382 1.879 4.419
1,2-Dichlorotetrafluoroethane f-114 C
2
CL
2
F
4
0.231 2.449 7.479
2,2 Dichloro C
2
HC
12
F
3
0.259 2.336 6.829
1,1-Difluoro-1-Chloroethane C
2
H
3
CLF
2
0.341 1.957 4.776
1,1-Difluoroethane CH
3
CHF
2
0.415 1.536 2.940
1,1-Difluoroethylene CH
2
:CF
2
0.458 1.512 2.860
Diethylsilane C
4
H
12
Si 0.183 1.775 3.940
Difluoromethane f-32 CF
2
H
2
0.627 1.360 2.411
Dimethylamine (CH
3
)
2
NH 0.370 1.269 2.013
Dimethylether (CH
3
)
2
O 0.392 1.281 2.055
2,2-Dimethylpropane C(CH
3
)
4
0.247 1.613 3.244
Disilane Si
2
H
6
0.332 1.493 2.779
Ethane C
2
H
6
0.490 1.038 1.357
Ethanol C
2
H
6
O 0.394 1.282 2.057
Ethylacetylene C
4
H
6
0.365 1.384 2.388
Ethyl Chloride C
2
H
5
CL 0.408 1.516 2.879
Ref. No. J-836D508 gasdata.doc Vsn. 8.6
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