Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's
1-2
Section 1 Introduction
Installation and Operation Manual
X-TMF-SLA6900-SLA6800-MFC-eng
Part Number: 541B100AAG
August, 2009
1-4 Specifications
Physical:
PERFORMANCE CHARACTERISTICS:
Flow Ranges*
Models SLA6950, SLA6960, SLA6850 & SLA6860
Any range from 0-3 sccm to 0-30,000 sccm N
2
eq.
Models SLA6951, SLA6961, SLA6851 & SLA6861
Any range from 20-100 slpm N
2
eq.
Up to 200 slpm H
2
flows possible (consult factory)
*Standard: 0° and 101kPa (760 Torr). Per SEMI Guideline E12-96. For full scale flow rates
greater than 50 sccm Nitrogen equivalent.
Control Range
(50:1) - elastomeric valve seat
(33:1) - metal valve seat
Accuracy
±1.0% of rate, including linearity (20% to 100% F.S.), ±0.2% of F.S. (below
20% full scale)
Repeatability
±0.20% of rate
Temperature Sensitivity
Zero: Less than 0.075% F.S. per °C
Span: Less than ±1% F.S. shift over 10-50°C range
Settling Time
Less than 800 ms to within ±2% full scale of final value for a 0-100% step per
SEMI Guideline E17-91.
(Refer to Figure 1)
RATINGS:
Operating Pressure
1500 psig maximum
150 psi (10.35 bar) maximum operating pressure
recommended for optimal performance
Pressure Equipment Directive (PED) 97/23/EC
Sound Engineering Practice
Pressure Differential Range
Model SLA6950, SLA6850
5-50 psid (3.45 bar max.)
Model SLA6951, SLA6851
10-50 psid (3.45 bar max.)
Minimum and Maximum pressure drop depends on
gas and FS flow rate (consult factory)
Do not operate this instrument in excess of the specifications
listed below. Failure to heed this warning can result in serious
personal injury and/or damage to the equipment.
WARNING
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