Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's
2-5
Section 2 Installation
Installation and Operation Manual
X-TMF-SLA6900-SLA6800-MFC-eng
Part Number: 541B100AAG
August, 2009
2-10 Operation Check Procedure
a. Mount the MFC/MFM in its final orientation.
b. Apply power to the MFC/MFM and allow approximately one hour for the
instrument to warm up and stabilize its temperature.
c. Do NOT supply gas to the MFC/MFM. Ensure that the differential pressure
across the MFC/MFM is zero.
d. Check the MFC/MFM zero.
e. The analog output signal should be 0.000 Vdc ± 0.2%. If the zero exceeds
one of these limits, follow the re-zeroing procedure in Section 3-5 (analog
mode).
f. Turn on the gas supply. A positive flow signal may be present due to valve
leak-thru (MFC only). Leak-thru may be significant (3.0%) with metal valve
seats.
g. Supply a setpoint voltage between 1 and 5 Vdc.
h. Check the analog output signal. The output voltage signal should match the
setpoint voltage (± 20mV) within 10 seconds after the setpoint is changed.
The Brooks (electric/electronic) equipment bearing the CE mark
has been successfully tested to the regulations of the Electro
Magnetic Compatibility (EMC directive 89/336/EEC). Special
attention is required when selecting the signal cable to be used
with CE marked equipment.
Brooks supplies high quality cables which meet the
specifications for CE certification. If you provide your own signal
cable you should use a cable which is completely screened with a
100% shield. D-Connectors should also be shielded using a metal
shield. If applicable, metal cable glands must be used to provide
cable screen clamping. The cable screen should be connected to
the metal shell or gland and shielded at both ends over 360
degrees. The shield should be terminated to an earth ground. See
Appendix A for CE Certification of Mass Flow Equipment.
NOTICE
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