Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's
Installation and Operation Manual
X-TMF-SLA6900-SLA6800-TMF-eng
Part Number: 541B100AAG
August, 2009
4-8
Section 4 Maintenance
& Troubleshooting
Where:
Q
NITROGEN
=
Nitrogen equivalent flow rate (sccm)
Q
GAS
=
Desired flow rate of the gas (sccm)
ρρρρρ
NITROGEN
=
Density of Nitrogen at 70°F
ρρρρρ
GAS
=
Density of the gas (taken at customer temperature)
SG
GAS
=
Specific gravity of the gas (taken at customer
temperature)
Refer to Table 4-5 for densities.
Example:
Q
gas
=
2,000 sccm
= 2,000 x .269
= 538 sccm Nitrogen
In order to calculate the orifice conversion factor when using a gas mixture,
the following formula must be used:
Where
P
1
=
percentage by volume of gas 1
P
2
=
percentage by volume of gas 2
P
n
=
percentage by volume of gas n
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