Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's
i
Contents
Installation and Operation Manual
X-TMF-SLA6900-SLA6800-MFC-eng
Part Number: 541B100AAG
August, 2009
Paragraph
Page
Number
Number
Section 1 Introduction
1-1
Scope ............................................................................................................................................... 1-1
1-2
Purpose ............................................................................................................................................ 1-1
1-3
Description ....................................................................................................................................... 1-1
1-4
Specifications ................................................................................................................................... 1-2
Section 2 Installation
2-1
General ............................................................................................................................................ 2-1
2-2
Receipt of Equipment ....................................................................................................................... 2-1
2-3
Recommended Storage Practice ..................................................................................................... 2-2
2-4
Return Shipment .............................................................................................................................. 2-2
2-5
Removal from Storage ..................................................................................................................... 2-2
2-6
Gas Connections .............................................................................................................................. 2-3
2-7
Installation ........................................................................................................................................ 2-3
2-8
In-Line Filter ..................................................................................................................................... 2-4
2-9
Electrical Interface ............................................................................................................................ 2-4
2-10
Operation Check Procedure ............................................................................................................. 2-5
Section 3 Operation
3-1
Overview .......................................................................................................................................... 3-1
3-2
Theory of Operation ......................................................................................................................... 3-1
3-3
Features ........................................................................................................................................... 3-2
3-4
Adaptive Valve Control ..................................................................................................................... 3-4
3-5
Analog Mode of Operation ............................................................................................................... 3-4
Section 4 Maintenance & Troubleshooting
4-1
Overview .......................................................................................................................................... 4-1
4-2
Troubleshooting ................................................................................................................................ 4-2
4-3
Gas Conversion Factors .................................................................................................................. 4-6
4-4
Orifice Sizing .................................................................................................................................... 4-7
4-5
Restrictor Sizing .............................................................................................................................. 4-10
Section A CE Certification
A-1
CE Certification of Mass Flow Equipment ........................................................................................ A-1
Warranty, Local Sales/Service Contact Information
....................................................................... Back Cover
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