MPS 500 – User Manual Rev. 2.1
BeamTec GmbH
Wolfgang-Paul-Str. 4, 89081 Ulm, Germany
http:
, e-mail: [email protected] tel.: +49 731 146620-0
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in reported measurements is not greater than 10% for the common gauges,
rising to a little above 20% for the less common gases, where less accurate
information is available.
6.
PG105 calibration – each particular wheatstone Pirani gauge type PG105
has to be calibrated for the atmospheric set point and the lowest
measurement point.
NOTE: for proper calibration please follow the instruction on the LCD
display during executing of this procedure. For proper calibration, the
gauge has to be installed on the vacuum system, where the pressure is
lower than 5e-4 mbar.
Calibration has to be performed in the way to achieve proper vacuum curve – see Fig.
4.4.9
Fig. 4.4.9
4.4.5.
SAFE
SETTINGS
OPTIONS
All of the parameters preset in the Setting menu must to be stored in internal
