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MPS 500 – User Manual Rev. 2.1

BeamTec GmbH

Wolfgang-Paul-Str. 4, 89081 Ulm, Germany

http:

, e-mail: [email protected] tel.: +49 731 146620-0

50

calibrated for nitrogen or air. If pressure measurements are being
performed with other gases, it may be necessary to correct the reading
accordingly. The Gas Type parameter is used to adjust the correction
factor for the respective gas type. The actual pressure is obtained by

multiplying the measured pressure with the correction factor:

P = P

N

/ S

g

Sg = S

N2

x R

g

where:

P

–

pressure

P

N

–

pressure for N2

S

g

–

sensitivity factor for gas g

S

N2

–

gauge sensitivity for N

2

Rg

–

gas correction factor

The gas type correction becomes a function of the pressure if the pressure
exceeds 0.5 mbar. This fact is taken into consideration for all gas types that
can be selected.
The following gas type correction factors are implemented and can be choose
using the arrow buttons

▲

or

▼

and MENU/ENTER button for each channel

separately:

«
...
48
49
50
51
52
...
»

Содержание Magnetron MPS 500

Страница 1: ... http www beamtec de e mail info beamtec de tel 49 731 146620 0 Magnetron Power Supply MPS 500 User Manual August 2016 Rev2 1 EXCECUTIVE SUMMARY The document contains a detailed description of the start up configuration interfacing of the power supply ...

Страница 2: ...MPS 500 User Manual Rev 2 1 BeamTec GmbH Wolfgang Paul Str 4 89081 Ulm Germany http www beamtec de e mail info beamtec de tel 49 731 146620 0 2 ...

Страница 3: ...TOOTH 13 2 5 4 ETHERNET IP 13 3 Installation 14 3 1 Unpacking 14 3 2 Mechanical Installation 14 3 2 1 Bench Top Unit 15 3 2 2 Rack Installation 15 3 3 Connecting 17 3 3 1 Rear Panel 17 3 3 3 Grounding 19 3 3 4 High Voltage Connectors HV1 and HV2 19 3 3 5 Interface Connector I O 21 3 3 6 Vacuum Gauge Connector Gauge 24 3 3 7 RS232 482 Interface Connector 25 3 3 8 Ethernet Interface 26 4 Using the P...

Страница 4: ... 9 SERVICE options 43 4 3 10 INFORMATION menu 43 4 4 0 COMMUNICATION options 44 4 4 0 1 INTERFACE Options 44 4 4 0 2 PARAMETERS Options 44 4 4 0 3 UNIT ADDRESS Option 45 4 4 0 4 SOFTWARE REMOTE Option 46 4 4 1 DISPLAY PARAMETERS Option 46 4 4 2 INTERLOCK TYPE option 47 4 4 3 BEEPER option 48 4 4 4 PRESSURE CHANNEL option 48 4 4 5 SAFE SETTINGS options 52 5 Additional Information 54 5 1 No Interloc...

Страница 5: ...cation is the formation of plasma processes The concept and design of the power supply allows for safe and reliable integration of complex process control systems The device is referred to as MPS500 in the remainder of this manual 1 2 LIABILITIES AND WARRANTY BeamTec BeamTec company is not liable for damages resulting from improper use of the device and the guarantee expires if the user or third p...

Страница 6: ...ence or who have been instructed by the end user of the product 1 4 2 ILLUSTRATION OF RESIDUAL DANGERS This Operating Manual illustrates safety notes concerning residual dangers as follows Information on preventing any kind of physical injury Information on preventing extensive equipment and environmental damage Information on correct handling or use Disregarding safety notes can lead to malfuncti...

Страница 7: ...o observe all safety notes given in this document and forward the information to all other users of the product In particular pay attention to the following safety notes Fig 1 0 1 Do not insert objects through louvers and keep device dry Mains voltage Contact with live parts is extremely hazardous when any objects are introduced or any liquids penetrate into the device Make sure that no objects en...

Страница 8: ...mtec de tel 49 731 146620 0 8 Improper use Improper use can damage the MPS500 Use the MPS500 only as intended by the manufacturer Improper installation and operation data Improper installation and operation data may damage the MPS500 Strictly adhere to the stipulated installation and operation data WARNING WARNING ...

Страница 9: ...ICAL DATA 2 1 GENERAL DATA 2 1 1 MECHANICAL DATA Dimensions Width 482 mm Height 88 1 mm 2 HU Depth 340 mm See Fig 2 1 1 Net Weight 3 3 kg Installation 19 Rack standard or Bench Top unit Fig 2 1 1 Dimensions mm Note The image above is illustrative rear panel connectors may differ depending on the version of the device 483 mm 87 mm 418 mm 310 mm 270 mm ...

Страница 10: ...tandard II Humidity resistance IP20 2 1 3 USE AND OPERATING MODES There are three common operation modes manual control with 5 buttons user interface on the front panel software remote control with RS232 RS485 or Ethernet Interface All Read commands are accessible all the time Write commands are accessible only with activation of this function from the user menu see remote control for use hardware...

Страница 11: ...ity generic immunity standard EN 61000 6 3 Electromagnetic compatibility generic emission standard 2 2 MAINS CONNECTION Voltage 230V for European African and Asian market 110V for American market Frequency 50 60 Hz Current consumption Max 3 15A at 230V 6 3A at 110V Power consumption Max 600 W Overvoltage category II Protection class 1 Connection European appliance connector IEC 320 C14 Fuse T3 15A...

Страница 12: ...Weight 6 1 kg 2 4 FEATURES Operating mode DC Two high voltage outputs the ability to support two independent magnetrons without having to use an external switch Fast response arc detection suppression Switched control methods I V P for maximum performance The ability to connect one active vacuum measuring head optional Transparent interface with OLED display and desk light identification parameter...

Страница 13: ...d 0 10V No of Analog Outputs 3 voltage output type opto isolated 0 10V Response time 100 ms max 2 5 2 UART I RS232 RS485 Connector D Sub 9 female connector Transmission mode 2400 4800 9600 19200 38400 57600 115200 bits s Data Length 8 bit Parity Control none Stop Bit 1 Transmission Control none 2 5 3 UART II BLUETOOTH Transmission mode 2400 4800 9600 19200 38400 57600 115200 bits s Data Length 8 b...

Страница 14: ...PS500 for completeness 4 Visually inspect the MPS500 for signs of damage Damaged product Putting a damaged product into operation can be extremely dangerous Never attempt to put a damaged product into operation Secure the damaged product from unintended operation Send a damage report to the haulage company or the insurer 3 2 MECHANICAL INSTALLATION MPS500 can be used in the following ways as a ben...

Страница 15: ...tion slots Do not expose the device to direct sunlight 3 2 1 BENCH TOP UNIT MPS500 is supplied with a 4 prop up feet which when the device is to be used as a stand alone device must be installed as shown in Fig 3 2 0 Fig 3 2 0 NOTE The prop up feet must be fixed only with the screws supplied In the case of rack mounting prop up feet should not be installed 3 2 2 RACK INSTALLATION The MPS500 is des...

Страница 16: ...ection class of the rack protection from foreign bodies and water e g according to the EN 60204 1 regulations for switching cabinets Take appropriate measures to restore the required protection class of the rack In case of rack installation all of the prop up feet have to be removed To do this 1 Turn the MPS500 off and remove the mains cable 2 Carefully turn the MPS500 over to reveal the bottom as...

Страница 17: ...ING 3 3 1 REAR PANEL A B C D E F G H Fig 3 3 0 Rear panel MPS500 A HV1 and HV2 output connectors type N 50 2 0 G1 07 B fans and filters C RS232 interface Dsub 9 female RS485 optionally D Ethernet interface RJ45 E main power socket IEC C13 F I O interface connector Dsub 25 female see chapter 3 3 5 for details G Vacuum Gauge Connector Dsub 9 H grounding pin ...

Страница 18: ...e available connections and photographs of cables is described in the following sections 3 3 2 MAINS CONNECTION The mains connection is designed for a mains cable which contains IEC 320 connector on the device side A mains cable is supplied with the device If the plug is not compatible with your wall socket you should replace it with a suitable mains cable Three conductor cable with protective gro...

Страница 19: ...f the mains cable with the wall socket Note If the device is installed in a switching cabinet the mains power can be supplied via a switchable central power distributor 3 3 3 GROUNDING Grounding screw Fig 3 3 0 the reference H should be used to connect the MPS500 with the main grounding system in which it operates It is recommended to use a cable with a minimum section of 2 5 mm2 If required conne...

Страница 20: ...ut a connected load Doing so can damage the power supply CAUTION Hazardous voltage After entering Operate mode HV LED indicator on the front panel is lit the connector develops voltage levels dangerous to life and health The device must be turned off and completely isolated before any work associated with connecting or disconnecting the high voltage cable When turned off you must wait at least 15 ...

Страница 21: ...0 500W Max load 50mA AO Analogue Output for output current measurement I_OUT 0 10V 0 500 mA Max load 50mA DO Digital Output open drain type active low when device set to constant current stabilization mode max voltage 50VDC max current 220mA Common signal at pin 13 DO Digital Output open drain type active low when arcs detected Active for 1ms from last arc detected if this function activated in us...

Страница 22: ... The Digital Outputs signals DO Digital Output open drain type active low when device set to constant voltage stabilization mode max voltage 50VDC max current 220mA Common signal at pin 13 DO Digital Output open drain type active low if any error detected e g over temperature trigger lost ect Exact error status can be read true the serial interface see transmission protocol for details max voltage...

Страница 23: ...9081 Ulm Germany http www beamtec de e mail info beamtec de tel 49 731 146620 0 23 Fig 3 3 1 Basic connection Improper connection In the case of incorrect connection in accordance with Tab 3 0 0 and Fig 3 3 1 there is a danger of damage to the power supply CAUTION ...

Страница 24: ...is continually updated and provided with each firmware upgrade contact supplier for available firmware versions The vacuum gauge can be connected directly to the D Sub 9 connector Please refer to Fig 3 3 2 for details 1 Fig 3 3 2 Vacuum gauge connector pinouts 1 PG sense Hi Bridge 2 PG Bridge power signal 3 Analogue IN input signal 0 10V gauge 1 4 PG I Bridge signal 5 PG sense Low signal 6 24V sup...

Страница 25: ...485 INTERFACE CONNECTOR MPS500 can be controlled via RS232 or RS485 interface NOTE only one interface is available and has to be configured with order The RS485 interface is Half Duplex type and requires a terminal resistor please refer to Fig 3 3 5 Please refer to Fig 3 3 4 and Fig 3 3 5 for hardware connection The transmission protocol is described in separate document contact supplier for detai...

Страница 26: ...nnected in the plug in case of wiring between A and B pin 3 3 8 ETHERNET INTERFACE The Ethernet interface allows to communicate with MPS500 based on IEEE 802 2 standard with 100 MB s speed Note to achieve best performance and speed the LAN cable has to be shielded and Cat 6 or higher Both crossover non crossover types are equally permissable Please refer to Fig 3 3 6 for hardware connections in T5...

Страница 27: ...anual Rev 2 1 BeamTec GmbH Wolfgang Paul Str 4 89081 Ulm Germany http www beamtec de e mail info beamtec de tel 49 731 146620 0 27 1 Receive 2 Receive 3 Transmit 4 Not Used 5 Not Used 6 Transmit 7 Not Used 8 Not Used ...

Страница 28: ...pe 2 membrane press keyboard 3 high voltage indicator 4 alphanumeric display LCD 5 power meter bar 6 rotary encoder with press button 4 1 1 MAIN POWER SWITCH Switching On the power button position I activates the main power circuit of the device There is no possibility that high voltages can appear on the output connectors before transition to Operate mode see Chap 4 2 1 Switching off the unit pos...

Страница 29: ...r supply into the OPERATE or STAND BY mode HV On Off turn the high voltage ON OFF switch to OPERATE STANDBY mode Up Down user interface menu positions change ESC cancel the operation move one menu level up ENTER MENU this button has two functions a go to the Main menu b confirm current setting Fig 4 1 2 Membrane keyboard description Risk of the electric shock All connection to the devices may only...

Страница 30: ...ns of a multiline alphanumeric LCD display with character height of 12 9 mm The display has adjustable brightness and contrast see Chap 4 4 1 4 1 5 POWER BAR IDENTIFIER Maximum output power of the device is 500W This value is proportionally presented by the LED power bar identifier Three different colours green yellow and red additionally identify the power level High Voltage presence An active HV...

Страница 31: ...options selected with the keyboard 4 2 MENU Move to the main menu followed by selecting ENTER MENU button To navigate between the options of a menu use the arrow keys or To enter the selected sub menu again press ENTER MENU button The current operation can be canceled at any time by pressing the ESC key Pressing this this key also goes back to the previous menu If there is no reaction further keyp...

Страница 32: ...xample of constant CURRENT mode and Fig 4 2 2 for example of constant POWER mode Fig 4 2 1 example setting when in Constant Current Mode Fig 4 2 2 example setting when in Constant Power Mode Operating Mode parameter value is changed using the or keys or by turning the rotary encoder to change the mod NOTE The parameter changes via rotary encoder depends on the speed with which dial is rotated Slow...

Страница 33: ...t value which will be reached after switching to the operating mode HV ON Power value will follow according to the high voltage ramp which can be preset in Ramp menu Also if any other parameters voltage or current will exceed max preset value see chap 4 3 1 Fig 4 3 2 the voltage regulation mode will be limited so as not to exceed this value IMPORTANT The parameters will be stored automatically in ...

Страница 34: ...ever they are changed 4 2 5 CONSTANT CURRENT MODE SET Use arrow buttons or to set the pointer cursor on to Current value Fig 4 2 6 Turn rotary encoder to increase decrease the value NOTICE current value set is limited by maximum value which is preset and stored in the internal memory of the device Imax value can be changed from within the Limits menu see chap 4 3 1 Fig 4 2 6 Constant Current mode ...

Страница 35: ...in Menu Output Limits Ramp PID Parameters Arc Items Timer Mode Display Mode Load Save Settings Service Info Tab 3 1 When MPS500 is in the main menu press the MENU ENTER button or encoder button to move between other submenus Use arrow buttons or to navigate Turn rotary encoder to increase decrease the corresponding value 4 3 0 HV1 AND HV2 OUTPUT CONFIGURATION Use MENU ENTER button and arrow button...

Страница 36: ...same 4 3 1 LIMITS SETTINGS Use arrow buttons or to navigate and point to the Limits settings Fig 4 3 1 Fig 4 3 1 Press MENU ENTER button again and navigate with or to choose one of the limits Umax Imax Pmax Use the rotary encoder to change the value Fig 4 3 2 Fig 4 3 2 Press ESC button to cancel an operation and return to the menu one level up 4 3 2 RAMP SETTINGS Ramp option allows to smoothly sta...

Страница 37: ... even for small power values and can be individually and independently assigned to each of the high voltage outputs HV1 or HV2 Use arrow buttons or to navigate and point to the PID settings Fig 4 3 4 Fig 4 3 4 Use arrow buttons or to change the PI values Press MENU ENTER button to confirm or press ESC button to cancel an operation and return to the menu one level up 4 3 4 ARCS SETTINGS The arc det...

Страница 38: ... Fig 4 3 6 Once the arc event is sensed a number of functions are implemented Detect ON OFF arc handling system can be activated or deactivated with this option Off Time sets delay time 0 65ms before output high voltage turns back to normal operation after arc detection Detect Delay sets the time before active arc handling is activated again 0 6ms If no arc appears with in this particular period t...

Страница 39: ... continually without time limit period Time of operation from the HV turn on is displayed on the main screen than refer to section 4 2 1 Fig 4 3 8 Use Menu Enter button and arrow buttons or to switch the timer mode from DOWN to UP mode Timer value in DOWN mode is set in the main menu using the rotary encoder and has resolution of 10s see Fig 4 3 9 Fig 4 3 9 Use rotary encoder to change the Timer v...

Страница 40: ... modes Timer Mode Vacuum Mode Arc Detection mode Use arrow buttons or to navigate and point the Display Mode function Fig 4 3 10 to choose one of the above options Fig 4 3 10 and then choose the required display mode Fig 4 3 11 Fig 4 3 11 Use encoder button or Menu Enter button to change DisplayMode function This setting takes effect on the MainMenu screen where Timer Vacuum or Arc handling can be...

Страница 41: ...are available Use arrow buttons or to navigate and point the Load Save function Fig 4 3 13 Fig 4 3 13 Press MENU ENTER button to proceed to Load Save functions and choose one of the available functions Load Save or Restore Default See Fig 4 3 14 Fig 4 3 14 4 3 7 1 LOAD THE PROGRAM To Load one of the programs point on the Load Program function and press the MENU ENTER button Use arrow buttons or to...

Страница 42: ...ion see Fig 4 3 17 Fig 4 3 17 Press MENU ENTER button to confirm and store the program or press ESC button to cancel an operation NOTE if there is no action for more than 10s the program will return to the main menu without storing any data The following parameters are stored in the memory for each program Limits of the parameters Pmax Umax and Imax Current output parameter values Pset Uset Iset O...

Страница 43: ...Beeper Pressure Channel Save Settings Tab 3 2 4 3 9 SERVICE OPTIONS Service menu is protect by password and it used for internal factory settings only calibrations limits ect Fig 4 3 19 Fig 4 3 19 NOTE Any firmware upgrade does not reset these settings no recalibration is necessary 4 3 10 INFORMATION MENU Information menu consist of firmware version information and basic system parameters such as ...

Страница 44: ... of the I O interface please refer to section 3 3 5 Use arrow buttons or to navigate and point to the Communication function Press MENU ENTER button to proceed and continue with arrow buttons or to configure a specific interface Fig 4 4 0 Fig 4 4 0 4 4 0 1 INTERFACE OPTIONS With this menu one of the following interface to be use can be chosen RS232 485 Bluetooth Ethernet NOTE only one of the inter...

Страница 45: ...e fixed and take the following values 8 data bits 1 stop bit No parity IMPORTANT Because of EMC issues MPS500 chassis is strongly shielded This brings effects on the limited signal strength of the internal Bluetooth module and limits working distance to 5m only 4 4 0 3 UNIT ADDRESS OPTION Unit Address is the individual address which has to be assigned to the device and is used for serial communica...

Страница 46: ...e only Use arrow buttons or to navigate and point to the Communication function Press MENU ENTER button to proceed and continue with arrow buttons or to configure a particular interface Fig 4 4 2 Fig 4 4 2 NOTE this function can be activated only from the MPS500 unit and not remotely 4 4 1 DISPLAY PARAMETERS OPTION With this menu both the brightness and contrast of the display can be set Use arrow...

Страница 47: ...rom 35 100 NOTICE Like the backlight the minimum value is limited in order to avoid complete shutdown of the display 4 4 2 INTERLOCK TYPE OPTION MPS500 is equipped with external interlock see section 3 3 5 However there is also an internal interlock which can be used to operate the unit This interlock is triggered via the vacuum measurement NOTICE The interlock can be activated deactivated only fr...

Страница 48: ...ction Press MENU ENTER button to proceed and continue with arrow buttons or to activate deactivate the beeper Fig 4 4 6 Fig 4 4 6 4 4 4 PRESSURE CHANNEL OPTION MPS500 has two analogue inputs channels assigned for vacuum measurement This additional functionality allows for process control functions related to the vacuum measurement with out the need for an external vacuum gauge controller Channel 1...

Страница 49: ... at a time can be controlled from the MPS500 Active channel setting defines the active channel number 2 Gauge Type gauge type to preset list is continuously updated with in new firmware versions please check for new firmware accessibility 3 Setpoints choose setpoint low and setpoint high hysteresis for vacuum interlock triggering Refer to Fig 4 4 8 for setpoint logic Fig 4 4 8 NOTE Interlock relat...

Страница 50: ...ive gas type The actual pressure is obtained by multiplying the measured pressure with the correction factor P PN Sg Sg SN2 x Rg where P pressure PN pressure for N2 Sg sensitivity factor for gas g SN2 gauge sensitivity for N2 Rg gas correction factor The gas type correction becomes a function of the pressure if the pressure exceeds 0 5 mbar This fact is taken into consideration for all gas types t...

Страница 51: ...1 94 SF6 2 2 C2H6 ethane 2 6 Xe 2 87 Hg 3 64 C3H8 Propane 4 2 DEFINE 0 10 Tab 3 Gas correction factors Additionally the user can define any other gas type correction in the range 0 to 10 IMPORTANT Nominal relative sensitivity factors cannot be relied upon for accurate measurements since they are known to vary significantly between seemingly identical gauges and more so for different gauge types fi...

Страница 52: ...wheatstone Pirani gauge type PG105 has to be calibrated for the atmospheric set point and the lowest measurement point NOTE for proper calibration please follow the instruction on the LCD display during executing of this procedure For proper calibration the gauge has to be installed on the vacuum system where the pressure is lower than 5e 4 mbar Calibration has to be performed in the way to achiev...

Страница 53: ...tr 4 89081 Ulm Germany http www beamtec de e mail info beamtec de tel 49 731 146620 0 53 memory Please confirm this option to store the data Otherwise all of the settings will be lost when the unit is turned off Fig 4 4 10 Fig 4 4 10 Save Settings Saving OK ...

Страница 54: ...his information stays on the display until ESC button is pressed Hardware Interlock wiring has been described in section 3 3 5 5 2 INTERLOCK LOST DURING THE NORMAL OPERATION If the power supply is operating in HV ON mode when the interlock will be lost the unit will be automatically set to STANDBY mode HV OFF and the following message will appear Fig 5 1 1 This information stays on the display unt...

Страница 55: ...nternal protective circuit against the overheating The setpoint is set at 75 oC If unit is in operating mode HV ON and this temperature is exceeded MPS500 will automatically switch to the STANDBAY mode and the following message is displayed Fig 5 1 2 Normal operating is suspended This information stays on the display until the ESC button is pressed OverTemperature Int Temp 65C ...

Страница 56: ...ial maintenance work except filter cleaning and exchange Important Please check and exchange filters on the rear panel frequently Do not remove EMI filters To exchange the filters please use a flat screwdriver or knife and remove the upper fan cover Fig 6 1 0 Fig 6 1 0 Fig 6 1 1 Exchange the filters and put them back Please take care to close the cover correctly a click should be heard when pressi...

Страница 57: ...for spare part numbers and pricing 6 1 1 CLEANING For cleaning the outside of the device a slightly moistened cloth will usually do Do not use any aggressive or abrasive cleaning agents DANGER Mains voltage Components inside of the MPS500 are components to mains voltage Do not insert any objects through the louvers of the device Protect the device from liquids Do not open the device ...

Страница 58: ...r storing the MPS500 and for shipping it to an BeamTec service center 7 2 STORAGE The MPS500 may only be stored in a dry room The following requirements must be met Ambient temperature 20 60 C Humidity as low as possible Preferably in an air tight plastic bag with a desiccant 7 3 DISPOSAL The product must be disposed of in accordance with the relevant local regulations for the environmentally safe...

Страница 59: ...rdware interlock is missed during operation when HV ON Check hardware interlock connection or check external interlock source refer to section 3 3 5 4 No output voltage but maximum current appears Imax on LCD display The maximum current has been exceed Probably output shortcut check cable and the load connection 5 No HV LED identification on when HV ON max Current appears Probably output shortcut ...

Страница 60: ...ties guarantee or remedies not specifically stated in this Limited Warranty This warranty does not cover ordinary wear and tear or expendable components BeamTec s obligation under this Limited Warranty is at BeamTec s option to repair or replace any defective equipment or parts of the equipment without charge to the purchaser which are returned shipping prepaid to the BeamTec facility For return o...

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