MPS 500 – User Manual Rev. 2.1
BeamTec GmbH
Wolfgang-Paul-Str. 4, 89081 Ulm, Germany
http:
, e-mail: [email protected] tel.: +49 731 146620-0
48
NOTICE: MPS500 is always hardware interlocked – it is not possible to deactivate it.
Operation with high voltage is prohibited. The same situation occurs when
INTERNAL interlock is set – Fig. 4.4.4. To ignore INTERNAL interlock, set
interlock to external only – Fig. 4.4.5
Fig.4.4.5
4.4.3
BEEPER
OPTION
MPS500 has an audible beeper and several actions result in a beep ( button press, end
of the process, failure ).
Use arrow buttons
▲
or
▼
to navigate and point the Beeper function. Press
MENU/ENTER button to proceed and continue with arrow buttons
▲
or
▼ to
activate/deactivate the beeper – Fig. 4.4.6
Fig.4.4.6
4.4.4
PRESSURE
CHANNEL
OPTION
MPS500 has two analogue inputs channels assigned for vacuum measurement.
This additional functionality allows for process control functions related to the
vacuum measurement with out the need for an external vacuum gauge controller.
Channel 1 has a fixed configuration and is assigned to work with a low cost
wheatstone vacuum Pirani gauge, type PG105. Please refer to section 3.3.6 for
hardware connections.
Channel 2 is assigned to work with any commercially available active vacuum gauge.
NOTE: If a particular gauge is not listed, please ask the supplier for new firmware
possibilities and upgrade.
Interlock Type:
EXT
<
Beeper: OFF
<
Pressure Channel