Asyst Technologies VersaPort 2200, Техническое руководство

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Page 74 2000-1252-01 Released Rev. C
VersaPort 2200 Technical Manual
Chapter 4: Service
CAP1 – Align Laser Detector System
a
_____3. Repeat Step 2 process to choose F4, Sensor Alignment , then select Slot
Sensor and read DAC value. Press F4 to stop calibration.
_____4. Repeat Step 2 to choose F4 , Sensor Alignmen t, then select Protrude
Sensor and read DAC value. Press F4 to stop calibration.
_____5. With all DAC values less than or equal to 30, return the VersaPort to the Home
position.
WARNING
MECHANICAL HAZARD
A
PINCH HAZARD EXISTS AT THE PORT PLATE AS IT LOWERS
TO THE PORT DOOR
. K
EEP HANDS AWAY FROM THE PORT
PLATE PATH
.
A
PINCH HAZARD MAY EXIST AT THE BOTTOM OF THE
MINIENVIRONMENT WHEN THE PORT PLATE REACHES THE
H
OME POSITION
. K
EEPS HANDS AWAY FROM THE
MINIENVIRONMENT PATH
.
_____a. Select F10 (MAIN) Menu
_____b. From the MAIN Menu select F1 (AUTO).
_____c. From the AUTO menu select F2 (HOME). The port plate returns to the
Home position
_____6. Place a Pod with cassette on the port and Autocycle the VersaPort to verify
operation;
_____a. From the MAIN Menu select F1 (AUTO).
_____b. From the AUTO menu select F9 (AUTOCYCLE).
_____c. If the VersaPort cycles properly, stop the Autocycle function by pressing
F9 again. The VersaPort will complete a cycle and stop at Home.
_____d. Remove the Pod. Press F10 to return to the MAIN Menu.
_____7. Raise the VersaPort a minimum of four inches to allow access to the
connector panel cover after the VersaPort is mounted to the Process Tool.
_____a. From the MAIN Menu select F2 (MANUAL).
_____b. From the MANUAL Menu select F5 (GOTO POS).
_____c. At the dialog box, select the Target Pos (inch) line and type 4 , then press
Enter three times, to accept Speed and Acceleration values and raise the
port plate.
_____8. Close the ISIM software program;
_____a. From the Main menu select F8 (EXIT)
_____b. Use the arrow keys to select Yes and press Enter .