Asyst Technologies VersaPort 2200, Техническое руководство

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Released Rev. C 2000-1252-01 Page 1
a
Preface
Introduction
This manual describes the Asyst VersaPort 2200 product line, which includes the
following:
Core Products
• VersaPort Platform Mount Standard . This version of the VersaPort can be
configured for operation mounted to a Process Tool platform or mounted to a
SEMI-standard BOLTS interface frame. The Standard VersaPort has a fixed port
door.
• VersaPort Platform Mount Shuttle . This version can be configured for operation
mounted to a Process Tool platform or mounted to a SEMI-standard BOLTS
interface frame. The Shuttle VersaPort has a horizontal shuttle.
Options
• BOLTS Interface. The SEMI-standard BOLTS interface frame can be used with
either of the core products above and, optionally, one of the options below.
• Reticle option
• RFID option
• MOCA
NOTE . . .
T
HE
R
ETICLE
, RFID,
AND
MOCA
OPTIONS CAN BE USED WITH EITHER
P
LATFORM
M
OUNT
—S
TANDARD OR
S
HUTTLE
—
OR WITH THE
V
ERSA
P
ORT
MOUNTED TO A
BOLTS I
NTERFACE
. T
HE OPTIONS
,
HOWEVER
,
CANNOT BE
USED SIMULTANEOUSLY WITH EACH OTHER
(
I
.
E
.,
THE
R
ETICLE OPTION CANNOT
BE USED WITH THE
MOCA,
AND SO FORTH
).
The VersaPort port door has provisions to support a copper interlock with the use of kit
P/N 9700-5836-01, sold separately.
Audience
This manual should be used by trained operators, service technicians and engineers to
set up, operate, and perform service and maintenance on the Asyst VersaPort 2200.