Asyst Technologies VersaPort 2200, Техническое руководство

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Page 158 2000-1252-01 Released Rev. C
VersaPort 2200 Technical Manual
Appendix B: Communications Software
SECS Communication
a
RCMD
NOTE . . .
T
HE
RCMD
MESSAGES ARE
ACCEPTED ONLY
AFTER THE
V
ERSA
P
ORT HAS
BEEN PLACED IN
SERVICE MODE
.
S
ERVICE MODE CAN
BE ENTERED BY
ISSUING AN
HCS
COMMAND
(S2,F41)
AND
RCMD = 18.
Remote Command, Send Parameter Required
1 = (A) Host to unlock port None
2 = (A) Host to lock port None
9 = (A) Go to stage position None
11 = (A) Get wafer map None
12 = Go to specified position Position in mils
13 = (A) Go Home None
14 = Reseat wafer None
15 = (A-M) Self-Test None
16 = Reset VersaPort error None
17 = Move a relative (1)Direction: up = 1
distance from the down = 0
current position (2)Relative Distance in mils
18 = (A-M) Switch out of normal operation mode and
into service mode None
19 = (A) Home position calibration None
20 = (A-M) Emergency stop None
83 = (A-M) Soft stop None
84 = Verify cassette
0 = Do not care
1 = Confirm cassette present
2 = Confirm cassette not present
90 = Stage seater out
128 = (A-M) Get motor status None
129 = (M) Close port-lifter servo loop None
130 = (M) Open port-lifter servo loop None
131 = (M) Reset servo driver circuit None
133 = (A-M) Return operation to
normal mode None
134 = (A-M) Get IO port status None
135 = (M) Modify individual IO bit
(1) IO port no. 0 to 2 (format A9)
(2) IO bit no. 0 to 7 (format A9)
136 = (A-M) Get system IRQ count report None
137 = (M) Wafer sensor align.:
(1) Sensor type (format A9):
0 = Wafer sensor
1 = Slot sensor
2 = Wafer protrude sensor
138 = (M) Modify DAC threshold:
(1) number (0 to 2)
(2) New value 0 to 255
S2,F41 A5
T
ABLE
20 Data Dictionary (Continued)
Variable Definition Where
Used Format