Asyst Technologies VersaPort 2200, Техническое руководство

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Page 176 2000-1252-01 Released Rev. C
VersaPort 2200 Technical Manual
Appendix B: Communications Software
SECS Communication
a
The following examples illustrate how the default event report option can be modified by
the Host to have the VPORT automatically report additional information following certain
events of interest. After completing messages 18 to 22, the VPORT will be configured to:
1. Enable all event up dates.
2. Attach cassette map status with the following event reports:
a. Reach stage
b. Return Home
c. Complete map
NOTE . . .
T
HE MODIFIED REPORT OPTIONS ARE NOT SAVED IN A PERMANENT FILE AND
MESSAGES
18
TO
22
MUST BE RESENT AFTER EACH POWER CYCLE FOR THE
EXPANDED EVENT REPORTS TO TAKE EFFECT
.
3. Attach port-lifter position and current slot number at transfer height with the following
event reports:
a. Reach new wafer
(12a) Host issues a command to inquire about the VPORT cassette map status
Host: 05
VPORT: 04
Host:
0D 00 FB 81 05 80 01 0D
00 00 00 21 01 02 01 9F Stream = 1, Function = 5
Form code = 2
VPORT: 06
(12b) VPORT reports the VPORT cassette wafer map status
VPORT: 05
Host: 04
VPORT:
5C 80 FB 01 06 80 01 0D
00 00 00 01 02 21 01 02
01 19 A5 01 02 A5 01 01
A5 01 01 A5 01 02 A5 01
02 A5 01 02 A5 01 01 A5
01 02 A5 01 01 A5 01 02
A5 01 01 A5 01 02 A5 01
02 A5 01 01 A5 01 02 A5
01 02 A5 01 02 A5 01 02
A5 01 02 A5 01 02 A5 01
02 A5 01 02 A5 01 02 A5
01 02 A5 01 02 12 1F
Stream = 2, Function = 16
Echoes Form Code = 2, slot 1
to 25 status are: 2(empty),
1(full), 1(full), 2(empty),
2(empty), 2(empty), 1(full),
2(empty), 1(full), 2(empty),
1(full), 2(empty), 2(empty),
1(full), 2(empty), 2(empty),
2(empty), 2(empty), 2(empty),
2(empty), 2(empty), 2(empty),
2(empty), 2(empty), 2(empty)
Host: 06