Asyst Technologies VersaPort 2200, Техническое руководство

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Released Rev. C 2000-1252-01 Page 83
VersaPort 2200 Technical Manual
Chapter 4: Service
CAP3 – Align Wafer Seater Mechanism
a
_____5. Use a 5/64 inch Allen wrench to loosen- but not remove- two actuator arm set
screws (see Figure 27 ).
_____6. Use ISIM to move the wafer seater mechanism out, then back to Home to
ensure that the seater motor is at the Home position;
_____a. From MAIN MENU , select F2 (MANUAL).
_____b. From MANUAL Menu select F6 (DC MOTOR).
_____c. From the DC Motor submenu, use arrow keys select SEATER OUT and
press Enter .
_____d. From MANUAL Menu select F6 (DC MOTOR).
_____e. From the DC Motor submenu, use arrow keys to select SEATER IN and
press Enter .
_____7. Use a Phillips screwdriver to loosen- but not remove- the two screws securing
the wafer seater motor to the port plate. Rotate the motor counter-clockwise
until resistance is felt, then move back clockwise a few degrees. Tighten
screws.
_____8. Repeat the Seater Out / Seater In step above to establish new motor Home
position.
_____9. At the bottom of the port plate, push the wafer seater arm into the laser
bracket cover until it contacts the back of the port plate. Pull seater arm away
from port plate to provide 0.30 to 0.50 clearance between the seater roller and
F
IGURE
27
Wafer Seater Mechanism, side view
SHAFT ON ACTUATOR ARM
ACTUATOR ARM
WAVY WASHER UNDER ACTUATOR ARM
LASER BRACKET
Push up on seater arm so arm is not
rubbing on laser bracket.
WAFER SEATER ARM
Push down on actuator arm slightly while also
pushing up on seater arm to preload wavy washer