Asyst Technologies VersaPort 2200, Техническое руководство

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Page 86 2000-1252-01 Released Rev. C
VersaPort 2200 Technical Manual
Chapter 4: Service
CAP3 – Align Wafer Seater Mechanism
a
_____16. At the wafer cassette, slide the test wafer out of the slot approximately one
inch. Use ISIM to move the wafer seater mechanism out to reseat the
protruding wafer;
_____a. From MANUAL Menu select F6 (DC MOTOR).
_____b. From the DC Motor submenu, use arrow keys select SEATER OUT and
press Enter .
_____c. The wafer seater will move out and reseat the wafer.
_____d. From MANUAL Menu select F6 (DC MOTOR).
_____e. From the DC Motor submenu, use arrow keys to select SEATER IN and
press Enter .
_____17. Push the wafer into the cassette. It should move approximately 1/16 inch
before contacting the back of the cassette. If wafer seater positioned the wafer
properly in cassette, proceed to Step 19. If seater needs adjustment, proceed
to next step.
_____18. Wafer seater outward travel is controlled by adjusting wafer seater flag screw
at the top of the actuator arm. Use a Phillips screwdriver to loosen screw in
middle of actuator arm. Move the sensor flag away from the port door to
increase the travel (and position wafer deeper in cassette). Move sensor flag
toward the port door to reduce travel. Tighten the sensor flag screw.
_____19. Repeat step 16. Verify the gap between the wafer seater roller and the edge of
the port plate is maintained at 0.30 - 0.50 inch. If not, repeat Step 12,
paragraph 3 and 4.
_____20. When adjustment is satisfactory, with the seater at IN position, remove one set
screw from the actuator arm and place a small drop of Loctite on the threads
and reinstall. Repeat for the second set screw. Repeat step 16 to ensure wafer
is seated properly into cassette.
_____21. Autocycle the VersaPort to ensure proper operation;
_____a. From the AUTO Menu select F9 (AUTOCYCLE).
The VersaPort will move to Stage position and return Home, while
exercising all motors. Press
F9 to stop the Autocycle function.
Post-Service
_____1. If necessary, return the VersaPort to the Process Tool.
_____2. Reinstall minienvironment shield.
_____3. The procedure is complete when the VersaPort has been remounted to the
Process Tool—with the minienvironment reinstalled—and has been
Autocycled ten times.