Asyst Technologies VersaPort 2200, Техническое руководство

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Released Rev. C 2000-1252-01 Page 191
VersaPort 2200 Technical Manual
Appendix B: Communications Software
ASCII Serial Text Interface
a
Example of FSD messages:
(1) Reply from VersaPort for a status request (FSR, form code = 0)
“FSD0<space>PIO=OFF<space>PIP=TRUE<space>READY=TRUE<space>HOME=TR
UE
PRTST=UNLK<space>ELDN=FALSE<space>ELUP=TRUE<space>ELSTAGE=FALSE
SEATER=HOME<space>MODE=AUTO<space>SLOT-
POS=0<space>EVPORTS=0(CR)(LF)”
Interpretation of message:
Parallel interlocks disabled, Pod is present, VersaPort ready for new command, VersaPort
at Home, port is unlocked, port-lifter not at down limit, port-lifter at up limit, port-lifter
not at stage position, seater at Home port-lifter is below slot number 1, port-lifter position
is 0 mil below Home.
(2) Reply from VersaPort for status request (FSR, form code = 1)
FSD1<space>“6005-1030-10<space>REV<space>?(CR)(LF)”
3) Reply to cassette map status request (FSR, form code = 2)
“FSD2<space>S1=E<space>S2=E<space>S3=E<space>S4=E<space>S5=E<space>S6
=E<space>S7=E<space>S8=E<space>S9=E
S10=E<space>S11=F<space>S12=F<space>S13=F<space>S14=F<space>S15=F<spa
ce>S16=F<space>S17=F<space>S18=F
S19=C<space>S20=C<space>S21=U<space>S22=U<space>S23=U<space>S24=U<sp
ace>S25=U(CR)(LF)”
Interpretation of message:
Slots 1 to 10 are empty, slots 11 to 18 are filled with wafers, slots 19
and 20 have a crossed wafer, and the status of slots 21 to 25 are
unknown at the moment (those slot positions have not yet gone past
the sensors).
(FSR) Formatted Status Request Host
−>
Load Port
Descriptions:
Host uses this message to find out the current Load Port status. Equivalent SECS:
S1F5.
Primary/Secondary:
Primary; the response will be an FSD message.
Structure:
FSR<space>FC=XX<CR><LF>
Where: XX = form code, can be either 0 or 2
FC=0: Load Port status request.
FC=1: software revision.
FC=2: cassette map status request.