Asyst Technologies VersaPort 2200, Техническое руководство

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Released Rev. C 2000-1252-01 Page 51
VersaPort 2200 Technical Manual
Chapter 3: Diagnostics and Troubleshooting
Error Messages
a
"Port hold-down failed to close"
After a Pod is placed on the port and a
Latch Pod
command is sent,
the Pod hold-down latched limit switch is not activated within the
allowable time.
"Elevator fails to reach target
position" Elevator did not reach the commanded position.
"Wafer protrusion sensor
malfunction" The reticle protrusion sensor either:
Did not detect the Pod door.
It was blocked for a period of time that is not consistent with the thickness
of a reticle.
"Slot sensor malfunction" The slot sensor failed to detect the port plate during self-test.
"Tripping of elevator over-travel
limit" Either:
The elevator has lost its position memory and drifted out of its normal
traveling range.
The elevator over-travel limit was not adjusted correctly.
"Excessive wafer out error" Either:
The gain of the vertical protrusion sensor amplifier was too high.
An obstacle was blocking the vertical protrusion sensor.
“Wafer sensor malfunction or
misaligned” Either:
a) The reticle sensor mirror has been misaligned.
b) The reticle sensor is in a constant block state.
"Position following error" After a motion command is sent, the instantaneous position of the elevator
deviates from the programmed position profile by more than the allowable
value.
"System error" The requested internal action is not found in the action list.
“Pod Removed” The Pod-In-Place switch is not depressed when the vertical drive position is
more than 2” away from home.
"EL home sensor failure"
(For VersaPort only) The elevator home sensor signal does not change its state.
T
ABLE
7 Non-Recoverable Errors (ALCD =5) (Continued)
Error Message Cause (Recovery)