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Chapter 6
79
Service
Replacement Procedure
6.
Se
rv
ic
e
Upper Electrode
1. Prepare the replacement electrode.
2. Remove the cap from the fixture.
3. Take out the screw from the top of the cap and remove the electrode from the cap.
NOTE
In case of the 16196D, take out the screw from the top of the cap while holding the
electrode.
4. Take the electrode out of the spring and insert the replacement electrode.
5. Push the electrode in from the bottom of the cap so that the top of the electrode
protrudes out of the top of the cap.
Figure 6-7
Electrode Replacement 1
Содержание 16196A
Страница 7: ...6...
Страница 12: ...Chapter 1 11 Installation Guide Incoming Inspection 1 Installation Guide Figure 1 1 16196A B C D Contents...
Страница 18: ...17 2 Product Overview 2 Product Overview...
Страница 37: ...36 Chapter3 Operation Connecting and Measuring DUTs...
Страница 38: ...37 4 User Maintenance 4 User Maintenance...
Страница 41: ...40 Chapter4 User Maintenance Overview Figure 4 1 Flowchart of User Maintenance...
Страница 59: ...58 Chapter4 User Maintenance Assembling Check...
Страница 68: ...67 6 Service 6 Service This chapter describes the proper maintenance of the fixture and parts replacement...
Страница 85: ...84 Chapter6 Service Assembling Check...