![Agilent Technologies 16196A Скачать руководство пользователя страница 72](http://html1.mh-extra.com/html/agilent-technologies/16196a/16196a_operation-and-service-manual_2867577072.webp)
Chapter 6
71
Service
Replaceable Parts
6.
Se
rv
ic
e
Cap
Figure 6-2
Cap Exploded View (for 16196A/B/C)
Table 6-2
Replaceable Parts (Cap)
Ref.
Desig.
Agilent Part No.
Qty.
Description
1
0515-1044
1
Screw Mach M1.6
2
16196-24005
1
Stopper
3
N/A
1
Cap
4
1460-2618
1
Spring
5
*1
*1.Maintenance Kit including 5 replaceable parts is available. Refer to “Maintenance
Kit” on page 74 for details.
16196-23008
1
Upper Electrode
Содержание 16196A
Страница 7: ...6...
Страница 12: ...Chapter 1 11 Installation Guide Incoming Inspection 1 Installation Guide Figure 1 1 16196A B C D Contents...
Страница 18: ...17 2 Product Overview 2 Product Overview...
Страница 37: ...36 Chapter3 Operation Connecting and Measuring DUTs...
Страница 38: ...37 4 User Maintenance 4 User Maintenance...
Страница 41: ...40 Chapter4 User Maintenance Overview Figure 4 1 Flowchart of User Maintenance...
Страница 59: ...58 Chapter4 User Maintenance Assembling Check...
Страница 68: ...67 6 Service 6 Service This chapter describes the proper maintenance of the fixture and parts replacement...
Страница 85: ...84 Chapter6 Service Assembling Check...