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Chapter 3
27
Operation
Selecting and Changing the Insulator Assembly
3
. O
per
at
ion
Step 2.
Replace the insulator assembly in the fixture with the selected insulator assembly.
Loosen the 2 screws used to fasten the insulator assembly with the hex wrench and take
them out, then remove the insulator assembly.
Figure 3-2
Removing the Insulator Assembly
NOTE
If the insulator assembly is difficult to remove, turn the fixture over and remove the
insulator assembly by letting it fall out.
CAUTION
There is danger of the measuring precision and repeatability being adversely affected, and
thus do not touch the lower electrode with your hands or damage it in any way.
Содержание 16196A
Страница 7: ...6...
Страница 12: ...Chapter 1 11 Installation Guide Incoming Inspection 1 Installation Guide Figure 1 1 16196A B C D Contents...
Страница 18: ...17 2 Product Overview 2 Product Overview...
Страница 37: ...36 Chapter3 Operation Connecting and Measuring DUTs...
Страница 38: ...37 4 User Maintenance 4 User Maintenance...
Страница 41: ...40 Chapter4 User Maintenance Overview Figure 4 1 Flowchart of User Maintenance...
Страница 59: ...58 Chapter4 User Maintenance Assembling Check...
Страница 68: ...67 6 Service 6 Service This chapter describes the proper maintenance of the fixture and parts replacement...
Страница 85: ...84 Chapter6 Service Assembling Check...