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Chapter 6
Service
Maintenance Kit
Maintenance Kit
The 16196U-maintenance kit is available to provide consumable products and replaceable
parts for the 16196A/B/C/D.
16196U Maintenance Kit
The 16196A/B/C/D common option and options for each model separately are available.
Table 6-5
16196A/B/C Common Option
Opt010
Upper Electrode Set for 16196A/B/C (5 pieces)
Table 6-6
16196A Option
Opt100
1608(mm) Short Plate Set (5 pieces)
Opt110
1608(mm) Lower Electrode Set (5 pieces)
Table 6-7
16196B Option
Opt200
1005(mm) Short Plate Set (5 pieces)
Opt210
1005(mm) Lower Electrode Set (5 pieces)
Table 6-8
16196C Option
Opt300
0603(mm) Short Plate Set (5 pieces)
Opt310
0603(mm) Lower Electrode Set (5 pieces)
Table 6-9
16196D Option
Opt020
Upper Electrode Set for 16196D (5 pieces)
Opt400
0402(mm) Short Plate Set (5 pieces)
Opt410
0402(mm) Lower Electrode Set (5 pieces)
Содержание 16196A
Страница 7: ...6...
Страница 12: ...Chapter 1 11 Installation Guide Incoming Inspection 1 Installation Guide Figure 1 1 16196A B C D Contents...
Страница 18: ...17 2 Product Overview 2 Product Overview...
Страница 37: ...36 Chapter3 Operation Connecting and Measuring DUTs...
Страница 38: ...37 4 User Maintenance 4 User Maintenance...
Страница 41: ...40 Chapter4 User Maintenance Overview Figure 4 1 Flowchart of User Maintenance...
Страница 59: ...58 Chapter4 User Maintenance Assembling Check...
Страница 68: ...67 6 Service 6 Service This chapter describes the proper maintenance of the fixture and parts replacement...
Страница 85: ...84 Chapter6 Service Assembling Check...