18
5. RUNNING PROCEDURE
Touch Panel Operation
(9) Leak test
Use this screen to check leak of the vacuum system and verify the performance of the vacuum
pump during the periodic maintenance, etc.
①
Shows the time to reach the required
vacuum. If the chamber has been
left in highly humid atmosphere, 2 to 3
minutes may be required to reach 13
Pa. If 1 Pa cannot be reached,
“0:00” will be shown, but it is no prob-
lem.
②
Shows the ultimate vacuum after 20
minutes. OK when below 10 Pa.
③
The valve of the evacuating line is
closed and the chamber is closed
completely 20 minutes after the start
of evacuating. Leak is detected by a
change in the degree of vacuum.
When a pressure rise is 20 Pa or be-
low after 20 minutes, there is no
problem in the cleaning performance.
④
Starts the leak test. A series of ex-
hausting to the vacuum leak is carried
out automatically. The required time
is 40 minutes.
⑤
Stops the test.
⑥
According to the current status,
standby, testing or end is shown.
⑦
Returns to the process screen.
①
①
①
①
②
②
②
②
③
③
③
③
④
④
④
④
⑤
⑤
⑤
⑤
⑥
⑥
⑥
⑥
⑦
⑦
⑦
⑦
Summary of Contents for PDC510
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