9
4. INSTALLATION METHOD
Auto
Auto
Auto
Auto----Tuning adjustment procedure
Tuning adjustment procedure
Tuning adjustment procedure
Tuning adjustment procedure
How to adjust the RF matching when conversion RIE and DP mode
How to adjust the RF matching when conversion RIE and DP mode
How to adjust the RF matching when conversion RIE and DP mode
How to adjust the RF matching when conversion RIE and DP mode
This Auto
This Auto
This Auto
This Auto----tun
tun
tun
tuning adjustment procedure is only use
ing adjustment procedure is only use
ing adjustment procedure is only use
ing adjustment procedure is only use following
following
following
following conditions when after conversion
conditions when after conversion
conditions when after conversion
conditions when after conversion
RIE to DP or DP to RIE mode.
RIE to DP or DP to RIE mode.
RIE to DP or DP to RIE mode.
RIE to DP or DP to RIE mode.
1)
1)
1)
1)
RF power does not match. (RF error occurrence)
RF power does not match. (RF error occurrence)
RF power does not match. (RF error occurrence)
RF power does not match. (RF error occurrence)
2)
Load in the chamber does not get in the matching range.
Load in the chamber does not get in the matching range.
Load in the chamber does not get in the matching range.
Load in the chamber does not get in the matching range.
High frequency has to need to take matching for load in the chamber. If can not take matching,
Reflection wave become bigger and then RF power does not descend effectively for the load sample
in the chamber. Also, in this case sometimes RF generator will become broken cause.
Auto-tuning adjustment switch location is inside left side panel.
(1)
Release interlock switch on side panel.
Pull out knob from original position
(
(
(
(
Interlock switch
Interlock switch
Interlock switch
Interlock switch
)
)
)
)
(
(
(
(
Auto
Auto
Auto
Auto----tuning adjustment switch
tuning adjustment switch
tuning adjustment switch
tuning adjustment switch
)
)
)
)
(2)
Select down position of VC1 and VC2 motor switch.
(3)
Select MANUAL position of AUTO/MANUAL selection switch.
After that about 5 to 10 sec VC1 or VC2 motor are moving.
(4)
AUTO/MANUAL switch return to AUTO position.
(5)
Remain VC1 and VC2 motor switch position.
(6)
Irradiation RF power by this condition. And then check matching.
(7)
After take matching, interlock switch return to original position, and then cover the side panel
VC1
VC1
VC1
VC1
AUTO
AUTO
AUTO
AUTO
/
/
/
/
MANUAL selection switch
MANUAL selection switch
MANUAL selection switch
MANUAL selection switch
VC1
VC1
VC1
VC1
motor switch
motor switch
motor switch
motor switch
VC2
VC2
VC2
VC2
AUTO
AUTO
AUTO
AUTO
/
/
/
/
MANUAL selection switch
MANUAL selection switch
MANUAL selection switch
MANUAL selection switch
VC2
VC2
VC2
VC2
motor switch
motor switch
motor switch
motor switch
Summary of Contents for PDC510
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